Effect of magnetic field on spoke behaviour in HiPIMS plasma

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00100935" target="_blank" >RIV/00216224:14310/18:00100935 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1088/1361-6463/aaa7d3" target="_blank" >http://dx.doi.org/10.1088/1361-6463/aaa7d3</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/aaa7d3" target="_blank" >10.1088/1361-6463/aaa7d3</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of magnetic field on spoke behaviour in HiPIMS plasma

Popis výsledku v původním jazyce

The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.

Název v anglickém jazyce

Effect of magnetic field on spoke behaviour in HiPIMS plasma

Popis výsledku anglicky

The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of physics D: Applied physics

ISSN

0022-3727

e-ISSN

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Svazek periodika

51

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

8

Strana od-do

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Kód UT WoS článku

000424898300002

EID výsledku v databázi Scopus

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