Spoke behaviour in reactive HiPIMS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00119026" target="_blank" >RIV/00216224:14310/21:00119026 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1088/1361-6595/abfbc5" target="_blank" >https://doi.org/10.1088/1361-6595/abfbc5</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/abfbc5" target="_blank" >10.1088/1361-6595/abfbc5</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Spoke behaviour in reactive HiPIMS

Popis výsledku v původním jazyce

Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating in the E × B direction, called spokes. Many studies were conducted focussing on the characterisation of their appearance, mode number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research has been conducted in the case of reactive sputtering, where only the general spoke characteristics were evaluated. A dual-image fast camera screening was utilised to capture plasma emission on 3'' Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the content of nitrogen in N2/Ar mixture was varied. The shape, velocity and spoke mode number were significantly affected by the higher content of N2 in the mixture. To distinguish between the effects of the modified target surface state and reactive gas present in the plasma volume on spokes experiments with compound NbN target were also performed. Surprisingly, no real differences of spoke behaviour between Nb and NbN targets were observed.

Název v anglickém jazyce

Spoke behaviour in reactive HiPIMS

Popis výsledku anglicky

Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating in the E × B direction, called spokes. Many studies were conducted focussing on the characterisation of their appearance, mode number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research has been conducted in the case of reactive sputtering, where only the general spoke characteristics were evaluated. A dual-image fast camera screening was utilised to capture plasma emission on 3'' Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the content of nitrogen in N2/Ar mixture was varied. The shape, velocity and spoke mode number were significantly affected by the higher content of N2 in the mixture. To distinguish between the effects of the modified target surface state and reactive gas present in the plasma volume on spokes experiments with compound NbN target were also performed. Surprisingly, no real differences of spoke behaviour between Nb and NbN targets were observed.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science and Technology

ISSN

0963-0252

e-ISSN

1361-6595

Svazek periodika

30

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

9

Strana od-do

„055016“

Kód UT WoS článku

000661255300001

EID výsledku v databázi Scopus

2-s2.0-85108839385