Optical Characterization of Thin Films Exhibiting Defects

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00104687" target="_blank" >RIV/00216224:14310/18:00104687 - isvavai.cz</a>

Výsledek na webu

<a href="https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10" target="_blank" >https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/978-3-319-75325-6_10" target="_blank" >10.1007/978-3-319-75325-6_10</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical Characterization of Thin Films Exhibiting Defects

Popis výsledku v původním jazyce

In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.

Název v anglickém jazyce

Optical Characterization of Thin Films Exhibiting Defects

Popis výsledku anglicky

In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.

Druh

C - Kapitola v odborné knize

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Optical Characterization of Thin Solid Films

ISBN

9783319753249

Počet stran výsledku

43

Strana od-do

271-313

Počet stran knihy

462

Název nakladatele

Springer

Místo vydání

Cham

Kód UT WoS kapitoly

000441388800012