Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00104689" target="_blank" >RIV/00216224:14310/18:00104689 - isvavai.cz</a>

Výsledek na webu

<a href="https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473" target="_blank" >https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/sia.6473" target="_blank" >10.1002/sia.6473</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization

Popis výsledku v původním jazyce

A new approach to calculation of optical quantities of inhomogeneous layers is presented. In this approach, the Richardson extrapolation is used to improve the accuracy of the method, in which the inhomogeneous layer is approximated by a stack of thin homogeneous layers. The results presented in this paper are based on the assumption that the media are isotropic and the inhomogeneity is along the axis normal to the boundary. The results obtained by the new method are compared with those obtained without the Richardson extrapolation. The Richardson extrapolation brings significant improvement in accuracy, especially if the number of approximating layers is large. Moreover, the method using the Richardson extrapolation proceeds in steps with an error estimate available in each step; thus, the calculation can be stopped when the desired accuracy is reached. The use of the method is illustrated by means of the optical characterization of strongly inhomogeneous film of non-stoichiometric silicon nitride.

Název v anglickém jazyce

Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization

Popis výsledku anglicky

A new approach to calculation of optical quantities of inhomogeneous layers is presented. In this approach, the Richardson extrapolation is used to improve the accuracy of the method, in which the inhomogeneous layer is approximated by a stack of thin homogeneous layers. The results presented in this paper are based on the assumption that the media are isotropic and the inhomogeneity is along the axis normal to the boundary. The results obtained by the new method are compared with those obtained without the Richardson extrapolation. The Richardson extrapolation brings significant improvement in accuracy, especially if the number of approximating layers is large. Moreover, the method using the Richardson extrapolation proceeds in steps with an error estimate available in each step; thus, the calculation can be stopped when the desired accuracy is reached. The use of the method is illustrated by means of the optical characterization of strongly inhomogeneous film of non-stoichiometric silicon nitride.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

1096-9918

Svazek periodika

50

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

757-765

Kód UT WoS článku

000434647100011

EID výsledku v databázi Scopus

2-s2.0-85047660841