Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00121114" target="_blank" >RIV/00216224:14310/21:00121114 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/2079-6412/11/1/22" target="_blank" >https://www.mdpi.com/2079-6412/11/1/22</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/coatings11010022" target="_blank" >10.3390/coatings11010022</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

Popis výsledku v původním jazyce

This review paper is devoted to optics of inhomogeneous thin films exhibiting defects consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and uniaxial anisotropy. The theoretical approaches enabling the inclusion of these defects into formulae expressing the optical quantities of these inhomogeneous thin films are summarized. These approaches are based on the recursive and matrix formalisms for the transition layers and overlayers, averaging of the elements of the Mueller matrix using local thickness distribution or polynomial formulation for the thickness nonuniformity, scalar diffraction theory and Rayleigh-Rice theory or their combination for boundary roughness and Yeh matrix formalism for uniaxial anisotropy. The theoretical results are illustrated using selected examples of the optical characterization of the inhomogeneous polymer-like thin films exhibiting the combination of the transition layers and thickness nonuniformity and inhomogeneous thin films of nonstoichiometric silicon nitride with the combination of boundary roughness and uniaxial anisotropy. This characterization is realized by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. It is shown that using these optical techniques, the complete optical characterization of the mentioned thin films can be performed. Thus, it is presented that the values of all the parameters characterizing these films can be determined.

Název v anglickém jazyce

Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

Popis výsledku anglicky

This review paper is devoted to optics of inhomogeneous thin films exhibiting defects consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and uniaxial anisotropy. The theoretical approaches enabling the inclusion of these defects into formulae expressing the optical quantities of these inhomogeneous thin films are summarized. These approaches are based on the recursive and matrix formalisms for the transition layers and overlayers, averaging of the elements of the Mueller matrix using local thickness distribution or polynomial formulation for the thickness nonuniformity, scalar diffraction theory and Rayleigh-Rice theory or their combination for boundary roughness and Yeh matrix formalism for uniaxial anisotropy. The theoretical results are illustrated using selected examples of the optical characterization of the inhomogeneous polymer-like thin films exhibiting the combination of the transition layers and thickness nonuniformity and inhomogeneous thin films of nonstoichiometric silicon nitride with the combination of boundary roughness and uniaxial anisotropy. This characterization is realized by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. It is shown that using these optical techniques, the complete optical characterization of the mentioned thin films can be performed. Thus, it is presented that the values of all the parameters characterizing these films can be determined.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/LM2018097" target="_blank" >LM2018097: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Coatings

ISSN

2079-6412

e-ISSN

2079-6412

Svazek periodika

11

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

31

Strana od-do

22

Kód UT WoS článku

000610021300001

EID výsledku v databázi Scopus

2-s2.0-85098858760