Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F14%3A00073332" target="_blank" >RIV/00216224:14740/14:00073332 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26210/14:PU110145

Výsledek na webu

<a href="http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-53-25-5606" target="_blank" >http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-53-25-5606</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/AO.53.005606" target="_blank" >10.1364/AO.53.005606</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films

Popis výsledku v původním jazyce

Epitaxial ZnSe thin films exhibiting two important defects, i.e., boundary roughness and thickness nonuniformity, prepared on GaAs substrates, are optically characterized using a combination of variable-angle spectroscopic ellipsometry, spectroscopic near-normal reflectometry, and imaging spectroscopic reflectometry (ISR). The influence of boundary roughness is incorporated into optical quantity formulas by the Rayleigh-Rice theory. Thickness nonuniformity is included using averaging of the unnormalizedMueller matrices. The dispersion model of the optical constants of the ZnSe films is based on parametrization of the joint density of electronic states. Very thin overlayers represented by thin films with identically rough boundaries are taken into account on the upper boundaries of the ZnSe films. Standard optical techniques are used to determine the spectral dependencies of the optical constants of the ZnSe films, together with the parameters of roughness and thickness nonuniformity.

Název v anglickém jazyce

Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films

Popis výsledku anglicky

Epitaxial ZnSe thin films exhibiting two important defects, i.e., boundary roughness and thickness nonuniformity, prepared on GaAs substrates, are optically characterized using a combination of variable-angle spectroscopic ellipsometry, spectroscopic near-normal reflectometry, and imaging spectroscopic reflectometry (ISR). The influence of boundary roughness is incorporated into optical quantity formulas by the Rayleigh-Rice theory. Thickness nonuniformity is included using averaging of the unnormalizedMueller matrices. The dispersion model of the optical constants of the ZnSe films is based on parametrization of the joint density of electronic states. Very thin overlayers represented by thin films with identically rough boundaries are taken into account on the upper boundaries of the ZnSe films. Standard optical techniques are used to determine the spectral dependencies of the optical constants of the ZnSe films, together with the parameters of roughness and thickness nonuniformity.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Optics

ISSN

1559-128X

e-ISSN

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Svazek periodika

53

Číslo periodika v rámci svazku

25

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

5606-5614

Kód UT WoS článku

000341644300005

EID výsledku v databázi Scopus

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