Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F15%3APU115453" target="_blank" >RIV/00216305:26210/15:PU115453 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/15:00094362

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2190091" target="_blank" >http://dx.doi.org/10.1117/12.2190091</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2190091" target="_blank" >10.1117/12.2190091</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

Popis výsledku v původním jazyce

A new optical characterization method based on imaging spectroscopic reflectometry (ISR) is presented and illustrated on the characterization of rough non-uniform epitaxial ZnSe films prepared on GaAs substrates. The method allows the determination of all parameters describing the thin films exhibiting boundary roughness and non-uniformity in thickness, i.e. determination of the spectral dependencies of the optical constants, map of local thickness and map of local rms values of heights of the irregularities for the rough boundaries. The local normal reflectance spectra in ISR correspond to small areas (37x37 µm2 ) on the thin films measured within the spectral range 270–900 nm by pixels of a CCD camera serving as the detector of imaging spectrophotometer constructed in our laboratory. To our experience the small areas corresponding to the pixels are sufficiently small so that the majority of the films can be considered uniform in all parameters within these areas. Boundary roughness is included i

Název v anglickém jazyce

Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

Popis výsledku anglicky

A new optical characterization method based on imaging spectroscopic reflectometry (ISR) is presented and illustrated on the characterization of rough non-uniform epitaxial ZnSe films prepared on GaAs substrates. The method allows the determination of all parameters describing the thin films exhibiting boundary roughness and non-uniformity in thickness, i.e. determination of the spectral dependencies of the optical constants, map of local thickness and map of local rms values of heights of the irregularities for the rough boundaries. The local normal reflectance spectra in ISR correspond to small areas (37x37 µm2 ) on the thin films measured within the spectral range 270–900 nm by pixels of a CCD camera serving as the detector of imaging spectrophotometer constructed in our laboratory. To our experience the small areas corresponding to the pixels are sufficiently small so that the majority of the films can be considered uniform in all parameters within these areas. Boundary roughness is included i

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Optical Systems Design 2015: Advances in Optical Thin Films V

ISBN

9781628418170

ISSN

0277-786X

e-ISSN

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Počet stran výsledku

9

Strana od-do

"0C-1"-"0C-9"

Název nakladatele

Neuveden

Místo vydání

Neuveden

Místo konání akce

Jena

Datum konání akce

7. 9. 2015

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000366832100005