Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F16%3A00087663" target="_blank" >RIV/00216224:14740/16:00087663 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26210/16:PU118776

Výsledek na webu

<a href="http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta" target="_blank" >http://iopscience.iop.org/article/10.1088/2040-8978/18/1/015401/meta</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/2040-8978/18/1/015401" target="_blank" >10.1088/2040-8978/18/1/015401</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

Popis výsledku v původním jazyce

A rough non-uniform ZnSe thin film on a GaAs substrate is optically characterised using imaging spectroscopic reflectometry (ISR) in the visible, UV and near IR region, applied as a standalone technique. A global-local data processing algorithm is used to fit spectra from all pixels together and simultaneously determine maps of the local film thickness, roughness and overlayer thickness as well as spectral dependencies of film optical constants determined for the sample as a whole. The roughness of the film upper boundary is modelled using scalar diffraction theory (SDT), for which an improved calculation method is developed to process the large quantities of experimental data produced by ISR efficiently. This method avoids expensive operations by expressing the series obtained from SDT using a double recurrence relation and it is shown that it essentially eliminates the necessity for any speed-precision trade-offs in the SDT calculations.

Název v anglickém jazyce

Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

Popis výsledku anglicky

A rough non-uniform ZnSe thin film on a GaAs substrate is optically characterised using imaging spectroscopic reflectometry (ISR) in the visible, UV and near IR region, applied as a standalone technique. A global-local data processing algorithm is used to fit spectra from all pixels together and simultaneously determine maps of the local film thickness, roughness and overlayer thickness as well as spectral dependencies of film optical constants determined for the sample as a whole. The roughness of the film upper boundary is modelled using scalar diffraction theory (SDT), for which an improved calculation method is developed to process the large quantities of experimental data produced by ISR efficiently. This method avoids expensive operations by expressing the series obtained from SDT using a double recurrence relation and it is shown that it essentially eliminates the necessity for any speed-precision trade-offs in the SDT calculations.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Optics

ISSN

2040-8978

e-ISSN

—

Svazek periodika

18

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

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Kód UT WoS článku

000367187000025

EID výsledku v databázi Scopus

2-s2.0-84951732026