Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114444" target="_blank" >RIV/00216224:14310/20:00114444 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26210/20:PU138302

Výsledek na webu

<a href="https://doi.org/10.1016/j.apsusc.2020.147625" target="_blank" >https://doi.org/10.1016/j.apsusc.2020.147625</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2020.147625" target="_blank" >10.1016/j.apsusc.2020.147625</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Popis výsledku v původním jazyce

The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.

Název v anglickém jazyce

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Popis výsledku anglicky

The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

—

Svazek periodika

534

Číslo periodika v rámci svazku

December 2020

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000582367700057

EID výsledku v databázi Scopus

2-s2.0-85089942862