Multi-component (Al,Cr,Nb,Y,Zr)N thinfilms by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00115146" target="_blank" >RIV/00216224:14310/20:00115146 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0040609019307126" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0040609019307126</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2019.137685" target="_blank" >10.1016/j.tsf.2019.137685</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Multi-component (Al,Cr,Nb,Y,Zr)N thinfilms by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Popis výsledku v původním jazyce

Multi-component nitride thin films in the Al–Cr–Nb–Y–Zr system with non-equimolar composition have been deposited by reactive dc magnetron sputtering. The substrate temperature and substrate bias have been varied, from room temperature to 700°C and from 0 to -200 V, respectively. The relationship between these varied growth conditions on the structure, morphology, mechanical and corrosion properties of the films have been probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by X-ray diffraction. However, elemental energy dispersive spectroscopy maps, obtained in the scanning transmission electron microscope, indicated that there could be partial segregation of Al, Cr and Y atoms within the grains. The microstructure of the films became denser, more fine-grained and smoother as the bias and temperature were increased. Nanoindentation showed that the hardness of the films increased with both bias and temperature, reaching a maximum of 27 GPa. The corrosion resistance of the films, studied by performing potentiodynamic polarisation curves in 1 M HCl, was also found to be improved when compared to a commercially available hyper-duplex stainless steel and a ternary reference (Nb,Zr)N thin film as well.

Název v anglickém jazyce

Multi-component (Al,Cr,Nb,Y,Zr)N thinfilms by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Popis výsledku anglicky

Multi-component nitride thin films in the Al–Cr–Nb–Y–Zr system with non-equimolar composition have been deposited by reactive dc magnetron sputtering. The substrate temperature and substrate bias have been varied, from room temperature to 700°C and from 0 to -200 V, respectively. The relationship between these varied growth conditions on the structure, morphology, mechanical and corrosion properties of the films have been probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by X-ray diffraction. However, elemental energy dispersive spectroscopy maps, obtained in the scanning transmission electron microscope, indicated that there could be partial segregation of Al, Cr and Y atoms within the grains. The microstructure of the films became denser, more fine-grained and smoother as the bias and temperature were increased. Nanoindentation showed that the hardness of the films increased with both bias and temperature, reaching a maximum of 27 GPa. The corrosion resistance of the films, studied by performing potentiodynamic polarisation curves in 1 M HCl, was also found to be improved when compared to a commercially available hyper-duplex stainless steel and a ternary reference (Nb,Zr)N thin film as well.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

693

Číslo periodika v rámci svazku

JAN 1 2020

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

14

Strana od-do

1-14

Kód UT WoS článku

000501775900031

EID výsledku v databázi Scopus

2-s2.0-85075403351