Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00119345" target="_blank" >RIV/00216224:14310/22:00119345 - isvavai.cz</a>

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/ac2cae" target="_blank" >10.1088/1361-6463/ac2cae</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Popis výsledku v původním jazyce

The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.

Název v anglickém jazyce

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Popis výsledku anglicky

The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Physics D: Applied Physics

ISSN

0022-3727

e-ISSN

1361-6463

Svazek periodika

55

Číslo periodika v rámci svazku

3

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

13

Strana od-do

035205

Kód UT WoS článku

000709101500001

EID výsledku v databázi Scopus

2-s2.0-85118728156