Spatially resolved study of spokes in reactive HiPIMS discharge

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00125719" target="_blank" >RIV/00216224:14310/22:00125719 - isvavai.cz</a>

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0c" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0c</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/ac6a0c" target="_blank" >10.1088/1361-6595/ac6a0c</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Spatially resolved study of spokes in reactive HiPIMS discharge

Popis výsledku v původním jazyce

Understanding mechanisms behind the formation and propagation of ionisation zones, so-called spokes, have been highly important since the first observations in HiPIMS discharges. To this day, however, a complete description is still lacking. This contribution gives an insight into the spokes in reactive Ar-N2 atmosphere using titanium target. The aim of this study is to describe not only global parameters of spokes such as their shape, length and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with transition from non-reactive argon discharge towards the discharge driven in a pure nitrogen atmosphere. Implications on the gas dynamics and discharge transitions are discussed.

Název v anglickém jazyce

Spatially resolved study of spokes in reactive HiPIMS discharge

Popis výsledku anglicky

Understanding mechanisms behind the formation and propagation of ionisation zones, so-called spokes, have been highly important since the first observations in HiPIMS discharges. To this day, however, a complete description is still lacking. This contribution gives an insight into the spokes in reactive Ar-N2 atmosphere using titanium target. The aim of this study is to describe not only global parameters of spokes such as their shape, length and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with transition from non-reactive argon discharge towards the discharge driven in a pure nitrogen atmosphere. Implications on the gas dynamics and discharge transitions are discussed.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LM2018097" target="_blank" >LM2018097: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science and Technology

ISSN

0963-0252

e-ISSN

1361-6595

Svazek periodika

31

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000798964300001

EID výsledku v databázi Scopus

2-s2.0-85131074436