Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F24%3A00136282" target="_blank" >RIV/00216224:14310/24:00136282 - isvavai.cz</a>

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1361-6595/ad546b" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6595/ad546b</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/ad546b" target="_blank" >10.1088/1361-6595/ad546b</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets

Popis výsledku v původním jazyce

Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.

Název v anglickém jazyce

Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets

Popis výsledku anglicky

Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LM2018097" target="_blank" >LM2018097: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science and Technology

ISSN

0963-0252

e-ISSN

1361-6595

Svazek periodika

33

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

11

Strana od-do

1-11

Kód UT WoS článku

001250044700001

EID výsledku v databázi Scopus

2-s2.0-85196371037