Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F23%3A00130859" target="_blank" >RIV/00216224:14310/23:00130859 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/2079-6412/13/5/873" target="_blank" >https://www.mdpi.com/2079-6412/13/5/873</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/coatings13050873" target="_blank" >10.3390/coatings13050873</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

Popis výsledku v původním jazyce

In this study, a novel approach for characterizing the optical properties of inhomogeneous thin films is presented, with a particular focus on samples exhibiting absorption in some part of the measured spectral range. Conventional methods of measuring the samples only from the film side can be limited by incomplete information at the lower boundary of the film, leading to potentially unreliable results. To address this issue, depositing the thin films onto non-absorbing substrates to enable measurements from both sides of the sample is proposed. To demonstrate the efficacy of this approach, a combination of variable-angle spectroscopic ellipsometry and spectrophotometry at near-normal incidence was employed to optically characterize three inhomogeneous polymer-like thin films. The spectral dependencies of the optical constants were modeled using the Kramers–Kronig consistent model. It was found that it is necessary to consider thin, weakly absorbing transition layers between the films and the substrates. The obtained results show excellent agreement between the fits and the measured data, providing validation of the structural and dispersion models, as well as the overall characterization procedure. The proposed approach offers a method for optically characterizing a diverse range of inhomogeneous thin films, providing more reliable results when compared to traditional one-sided measurements.

Název v anglickém jazyce

Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

Popis výsledku anglicky

In this study, a novel approach for characterizing the optical properties of inhomogeneous thin films is presented, with a particular focus on samples exhibiting absorption in some part of the measured spectral range. Conventional methods of measuring the samples only from the film side can be limited by incomplete information at the lower boundary of the film, leading to potentially unreliable results. To address this issue, depositing the thin films onto non-absorbing substrates to enable measurements from both sides of the sample is proposed. To demonstrate the efficacy of this approach, a combination of variable-angle spectroscopic ellipsometry and spectrophotometry at near-normal incidence was employed to optically characterize three inhomogeneous polymer-like thin films. The spectral dependencies of the optical constants were modeled using the Kramers–Kronig consistent model. It was found that it is necessary to consider thin, weakly absorbing transition layers between the films and the substrates. The obtained results show excellent agreement between the fits and the measured data, providing validation of the structural and dispersion models, as well as the overall characterization procedure. The proposed approach offers a method for optically characterizing a diverse range of inhomogeneous thin films, providing more reliable results when compared to traditional one-sided measurements.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20501 - Materials engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Coatings

ISSN

2079-6412

e-ISSN

2079-6412

Svazek periodika

13

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

16

Strana od-do

1-16

Kód UT WoS článku

000997253700001

EID výsledku v databázi Scopus

2-s2.0-85160402607