Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F23%3A00134338" target="_blank" >RIV/00216224:14310/23:00134338 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system

Popis výsledku v původním jazyce

In this contribution, we focus on high entropy alloy, nitride and carbide coatings from the Cr-Hf-Mo-Ta-W system. The study aims to investigate the effects of deposition temperature and reactive gas flow on the microstructure, crystalline structure and mechanical properties of coatings deposited by reactive magnetron sputtering and hybrid PVD-PECVD magnetron sputtering from elemental segmented targets. The depositions are carried out at ambient temperatures and at 750°C. In particular, we will discuss the bcc-amorphous-fcc structure transition as the function of the nitrogen/carbon content, the differences between the reactive magnetron sputtering and hybrid PVD/PECVD sputtering on the deposition rate, the (absence) of the nitrogen/carbon content saturation and its effects on the micro- and nanostructure of the coatings and on the effect of the structure on the mechanical properties. Experimental findings are corroborated by ab initio density functional theory calculations. Finally, we will talk about the possibilities of future industrial applications.

Název v anglickém jazyce

Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system

Popis výsledku anglicky

In this contribution, we focus on high entropy alloy, nitride and carbide coatings from the Cr-Hf-Mo-Ta-W system. The study aims to investigate the effects of deposition temperature and reactive gas flow on the microstructure, crystalline structure and mechanical properties of coatings deposited by reactive magnetron sputtering and hybrid PVD-PECVD magnetron sputtering from elemental segmented targets. The depositions are carried out at ambient temperatures and at 750°C. In particular, we will discuss the bcc-amorphous-fcc structure transition as the function of the nitrogen/carbon content, the differences between the reactive magnetron sputtering and hybrid PVD/PECVD sputtering on the deposition rate, the (absence) of the nitrogen/carbon content saturation and its effects on the micro- and nanostructure of the coatings and on the effect of the structure on the mechanical properties. Experimental findings are corroborated by ab initio density functional theory calculations. Finally, we will talk about the possibilities of future industrial applications.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/GA23-05947S" target="_blank" >GA23-05947S: Teorií směřované studium povlaků keramik stabilizovaných vysokou entropií založených na těžkotavitelných kovech</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů