Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F24%3A00137077" target="_blank" >RIV/00216224:14310/24:00137077 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0925963524004461" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0925963524004461</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2024.111233" target="_blank" >10.1016/j.diamond.2024.111233</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition

Popis výsledku v původním jazyce

The main aim of the present study was to develop hard a-C:H:SiOx coatings prepared from the unique gaseous mixture of trimethylsilyl acetate (TMSAc) with methane using plasma of RF capacitively coupled glow discharge. Studied coatings were prepared using different methane ratios in TMSAc/CH4 gaseous mixtures ranging from 7.1 % to 85.7 %. Simultaneously, the influence of the power supplied to the discharge (25–100 W) on the properties of resulting coatings was investigated. The presented research work discusses in detail the evolution of chemical composition, mechanical characteristics, and optical properties of resulting coatings depending on variable CH4 ratio and discharge power. Within this study, various materials with the smooth surface structure were achieved. Applying low CH4 ratio and 25 W power led to the formation of soft SiOx CyHz coatings with high content of Si–O and –CH3 groups exhibiting hardness of approx. 0.95 GPa. Gradually increasing the CH4 ratio and discharge power up to the specified limit values (85 % and 100 W, respectively) induced structural changes, resulting in a-C:H:SiOx coatings with a remarkable hardness of 11 GPa and excellent fracture resistance. These attributes are of utmost importance in numerous industrial applications, including anticorrosive coatings, low-friction wear-resistant coatings to prolong the lifetime of car engines, biocompatible coatings, components for plastic molds, as well as parts for optical disc molds and textile machinery.

Název v anglickém jazyce

Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition

Popis výsledku anglicky

The main aim of the present study was to develop hard a-C:H:SiOx coatings prepared from the unique gaseous mixture of trimethylsilyl acetate (TMSAc) with methane using plasma of RF capacitively coupled glow discharge. Studied coatings were prepared using different methane ratios in TMSAc/CH4 gaseous mixtures ranging from 7.1 % to 85.7 %. Simultaneously, the influence of the power supplied to the discharge (25–100 W) on the properties of resulting coatings was investigated. The presented research work discusses in detail the evolution of chemical composition, mechanical characteristics, and optical properties of resulting coatings depending on variable CH4 ratio and discharge power. Within this study, various materials with the smooth surface structure were achieved. Applying low CH4 ratio and 25 W power led to the formation of soft SiOx CyHz coatings with high content of Si–O and –CH3 groups exhibiting hardness of approx. 0.95 GPa. Gradually increasing the CH4 ratio and discharge power up to the specified limit values (85 % and 100 W, respectively) induced structural changes, resulting in a-C:H:SiOx coatings with a remarkable hardness of 11 GPa and excellent fracture resistance. These attributes are of utmost importance in numerous industrial applications, including anticorrosive coatings, low-friction wear-resistant coatings to prolong the lifetime of car engines, biocompatible coatings, components for plastic molds, as well as parts for optical disc molds and textile machinery.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10300 - Physical sciences

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

1879-0062

Svazek periodika

147

Číslo periodika v rámci svazku

August 2024

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

12

Strana od-do

1-12

Kód UT WoS článku

001258541800001

EID výsledku v databázi Scopus

2-s2.0-85196009432