UV-VIS plošná reflektometrie

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F05%3APU54234" target="_blank" >RIV/00216305:26210/05:PU54234 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

UV-VIS Areal Reflectometry

Popis výsledku v původním jazyce

Construction and the first experimental results of the new apparatus for areal imaging of the optical properties of nonabsorbing or weakly absorbing thin films will be presented. The system is based on the principles of the spectroscopic reflectometry[1]; observed sample is illuminated at various wavelengths (selected by a monochromator) in the UV-VIS region and the intensity of the reflected light is detected by a CCD camera. Optical parameters of the thin films 50 - 2000 nm thick can be consequently ccalculated from the reflectance spectra. Sample size and lateral resolution is customizable and depends on imaging optics. Unique construction allows both, ex situ and in situ measurements, the computer control provides fast measurements and data acqusition. The apparatus can be used for the feedback control of various thin film processing. In the contribution application examples will be presented.

Název v anglickém jazyce

UV-VIS Areal Reflectometry

Popis výsledku anglicky

Construction and the first experimental results of the new apparatus for areal imaging of the optical properties of nonabsorbing or weakly absorbing thin films will be presented. The system is based on the principles of the spectroscopic reflectometry[1]; observed sample is illuminated at various wavelengths (selected by a monochromator) in the UV-VIS region and the intensity of the reflected light is detected by a CCD camera. Optical parameters of the thin films 50 - 2000 nm thick can be consequently ccalculated from the reflectance spectra. Sample size and lateral resolution is customizable and depends on imaging optics. Unique construction allows both, ex situ and in situ measurements, the computer control provides fast measurements and data acqusition. The apparatus can be used for the feedback control of various thin film processing. In the contribution application examples will be presented.

Druh

A - Audiovizuální tvorba

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

ISBN

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Místo vydání

Vienna

Název nakladatele resp. objednatele

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Verze

1

Identifikační číslo nosiče

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