Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F02%3APU29095" target="_blank" >RIV/00216305:26220/02:PU29095 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61389021:_____/02:52020033

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Popis výsledku v původním jazyce

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio offlow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of filmswas investigated.

Název v anglickém jazyce

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Popis výsledku anglicky

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio offlow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of filmswas investigated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

—

Projekt

<a href="/cs/project/GV106%2F96%2FK245" target="_blank" >GV106/96/K245: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2002

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Czechoslovak Journal of Physics

ISSN

0011-4626

e-ISSN

—

Svazek periodika

52

Číslo periodika v rámci svazku

suppl. D

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

8

Strana od-do

878-885

Kód UT WoS článku

—

EID výsledku v databázi Scopus

—