Zdroj pro Pulsní Magnetronové Naprašování.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54534" target="_blank" >RIV/00216305:26220/05:PU54534 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

čeština

Název v původním jazyce

Zdroj pro Pulsní Magnetronové Naprašování.

Popis výsledku v původním jazyce

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltagee waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decay

Název v anglickém jazyce

Pulse Power Source for Magnetron Sputtering

Popis výsledku anglicky

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltagee waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decay

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Mikrosyn. Nové trendy v mikroelektronických systémech a nanotechnologiích. Sborník seminare. Brno 12.12.2005

ISBN

80-214-3116-4

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

105-110

Název nakladatele

Nakl. Novotný

Místo vydání

Brno

Místo konání akce

Brno

Datum konání akce

12. 12. 2005

Typ akce podle státní příslušnosti

CST - Celostátní akce

Kód UT WoS článku

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