Pulsní zdroj pro magnetronové naprašování

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54614" target="_blank" >RIV/00216305:26220/05:PU54614 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Pulse power supply for magnetron sputtering.

Popis výsledku v původním jazyce

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. The mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputtering device with good coolingcapability. Cathode voltage and cathode current were recorded during both ON-Pulse and OFF-Pulse. This monitoring of the target current and voltage shows that transient spikes occur and the waveforms differ from idealized behavior. The voltage spike at tthe beginning of the ON-Pulse brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decays rapidly and later more slowly to zero, but it is not falling to zero completely when the Off-Pulse is shorter than 10 &#956;s about. This two-step decay of t

Název v anglickém jazyce

Pulse power supply for magnetron sputtering.

Popis výsledku anglicky

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. The mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputtering device with good coolingcapability. Cathode voltage and cathode current were recorded during both ON-Pulse and OFF-Pulse. This monitoring of the target current and voltage shows that transient spikes occur and the waveforms differ from idealized behavior. The voltage spike at tthe beginning of the ON-Pulse brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decays rapidly and later more slowly to zero, but it is not falling to zero completely when the Off-Pulse is shorter than 10 &#956;s about. This two-step decay of t

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Socrates Workshop

ISBN

80-214-3042-7

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

163-168

Název nakladatele

Nakl. Novotný

Místo vydání

Brno

Místo konání akce

Chania, Crete, Greece

Datum konání akce

21. 9. 2005

Typ akce podle státní příslušnosti

CST - Celostátní akce

Kód UT WoS článku

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