Noise in piezoresistive pressure sensors

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F15%3APU117243" target="_blank" >RIV/00216305:26620/15:PU117243 - isvavai.cz</a>

Výsledek na webu

<a href="https://ieeexplore.ieee.org/document/7288591" target="_blank" >https://ieeexplore.ieee.org/document/7288591</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/ICNF.2015.7288591" target="_blank" >10.1109/ICNF.2015.7288591</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Noise in piezoresistive pressure sensors

Popis výsledku v původním jazyce

In this paper we present the results of noise analysis in piezoresistive ceramic pressure sensors (CPSs) prepared by low temperature co-fired ceramics (LTCC) technology. For this study a piezoresistive CPSs in a full Wheatstone-bridge configuration were prepared. Low frequency noise measurements can be used for the quality evaluation of CPSs. The critical and non-critical defects could be determined from the noise measurements. Increased value of spectral density of sensor output voltage fluctuation gives the information about the cracks and structural defects in sensing resistor’s structure as well as about the crack in sensor’s diaphragm. We propose parallel/series configuration of resistors for measurement of particular sensing resistor influence on the total sensor noise. In this case the noise spectral density of single resistor in parallel to three resistors in series is 8 to 10times higher comparing to the noise spectral density of each of these three resistors in series. Then the sensing resistors with structural defects could be identified from the noise measurements.

Název v anglickém jazyce

Noise in piezoresistive pressure sensors

Popis výsledku anglicky

In this paper we present the results of noise analysis in piezoresistive ceramic pressure sensors (CPSs) prepared by low temperature co-fired ceramics (LTCC) technology. For this study a piezoresistive CPSs in a full Wheatstone-bridge configuration were prepared. Low frequency noise measurements can be used for the quality evaluation of CPSs. The critical and non-critical defects could be determined from the noise measurements. Increased value of spectral density of sensor output voltage fluctuation gives the information about the cracks and structural defects in sensing resistor’s structure as well as about the crack in sensor’s diaphragm. We propose parallel/series configuration of resistors for measurement of particular sensing resistor influence on the total sensor noise. In this case the noise spectral density of single resistor in parallel to three resistors in series is 8 to 10times higher comparing to the noise spectral density of each of these three resistors in series. Then the sensing resistors with structural defects could be identified from the noise measurements.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/ED1.1.00%2F02.0068" target="_blank" >ED1.1.00/02.0068: CEITEC - central european institute of technology</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Noise and Fluctuation (ICNF)

ISBN

978-1-4673-8335-6

ISSN

—

e-ISSN

—

Počet stran výsledku

4

Strana od-do

1-4

Název nakladatele

IEEE

Místo vydání

Neuveden

Místo konání akce

Sian (Xian)

Datum konání akce

2. 6. 2015

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000380427600056