Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F24%3APU155518" target="_blank" >RIV/00216305:26620/24:PU155518 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/24:00135428

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0169433223025047?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0169433223025047?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2023.158824" target="_blank" >10.1016/j.apsusc.2023.158824</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries

Popis výsledku v původním jazyce

Hexamethyldisiloxane (HMDSO) low-pressure plasmas are known for their versatility in the deposition of plasma polymer films (PPFs) with different properties and applications. Although they have been studied for decades, the reaction mechanisms of plasma polymer formation leave open questions, particularly when deposition on 3D materials with complex geometries such as cavities and undercuts is considered. In the present study, two configurations named "cavity" and "undercut" have been selected to study the influence of diffusion of film forming species and surface reactivity in HMDSO plasmas without and with O2 admixture. A varying spatial chemical composition of the plasma polymer deposit along the penetration depth of the studied configurations indicates different sticking probabilities of the film-forming species. Furthermore, although ion-induced effects are usually only considered for direct plasma exposure, the obtained results and additional etching experiments reveal that the contribution of high-energy particles might still be considered underneath small openings. Finally, the relevance of oxidizing chemical reactions at the surface inside the configurations is clarified when O2 is added to the plasma.

Název v anglickém jazyce

Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries

Popis výsledku anglicky

Hexamethyldisiloxane (HMDSO) low-pressure plasmas are known for their versatility in the deposition of plasma polymer films (PPFs) with different properties and applications. Although they have been studied for decades, the reaction mechanisms of plasma polymer formation leave open questions, particularly when deposition on 3D materials with complex geometries such as cavities and undercuts is considered. In the present study, two configurations named "cavity" and "undercut" have been selected to study the influence of diffusion of film forming species and surface reactivity in HMDSO plasmas without and with O2 admixture. A varying spatial chemical composition of the plasma polymer deposit along the penetration depth of the studied configurations indicates different sticking probabilities of the film-forming species. Furthermore, although ion-induced effects are usually only considered for direct plasma exposure, the obtained results and additional etching experiments reveal that the contribution of high-energy particles might still be considered underneath small openings. Finally, the relevance of oxidizing chemical reactions at the surface inside the configurations is clarified when O2 is added to the plasma.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/GC21-12132J" target="_blank" >GC21-12132J: Úpravy mikroporézeních polymerních nanomateriálů pro bioaplikace pomocí plazmatu a iontové implantace</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

APPLIED SURFACE SCIENCE

ISSN

0169-4332

e-ISSN

1873-5584

Svazek periodika

645

Číslo periodika v rámci svazku

158824

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

9

Strana od-do

„“-„“

Kód UT WoS článku

001111754700001

EID výsledku v databázi Scopus

2-s2.0-85176136395