Electrochemical characterization of Cr/CrN/B4C/B-C-N films deposited by magnetron sputtering under mixed Ar-Ne atmospheres

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F26%3A0197873" target="_blank" >RIV/00216305:26620/26:0197873 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0042207X25002829?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0042207X25002829?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2025.114292" target="_blank" >10.1016/j.vacuum.2025.114292</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Electrochemical characterization of Cr/CrN/B4C/B-C-N films deposited by magnetron sputtering under mixed Ar-Ne atmospheres

Popis výsledku v původním jazyce

B-C-N coatings have the potential to combine the properties of B4C, BN, CNx, and carbon structures, resulting in coatings with high hardness, low friction coefficient, high wear resistance, and high corrosion resistance, making them highly attractive for many applications as protective coatings. In this investigation, the impact of the Ar:Ne flow rate ratio used in the deposition process on the properties of Cr/CrN/B4C/B-C-N films was analyzed. The films were deposited by magnetron sputtering onto AISI M2 steel and silicon wafer substrates. The study focused on analyzing the influence of Ne addition to the working atmosphere on the bonding structure, chemical composition, and electrochemical behavior of the films. Scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD) techniques, Fourier transform infrared (FTIR) spectroscopy, and Xray photoelectron spectroscopy (XPS) were employed to determine the morphology, roughness, crystalline structure, BN phase fractions, atomic composition, and bonding states of the films. XRD analysis revealed that the B4C/B-C-N layers had an amorphous structure, while FTIR and XPS identified the presence of sp2 B-N, C=C, C-N, C=N, and B-O bonds within the films. Additionally, XPS studies demonstrated that higher Ne flow rate fractions (Ne70) increased nitrogen and boron content and reduced oxygen and carbon fractions, indicating enhanced nitrogen incorporation. Electrochemical tests were conducted on all samples and the uncoated metallic substrate in a 3.5 wt % NaCl solution as the electrolyte. These tests included open-circuit potential (OCP), electrochemical impedance spectroscopy (EIS), and potentiodynamic polarization (PD) measurements. The results showed that the Cr/CrN/B4C/B-C-N films deposited on AISI M2 steel exhibited superior corrosion resistance compared to the uncoated AISI M2 substrate. Notably, films deposited at higher Ne flow rate fractions exhibited 5.0-fold improved corrosion protection, attributed to lower porosity and denser microstructure.

Název v anglickém jazyce

Electrochemical characterization of Cr/CrN/B4C/B-C-N films deposited by magnetron sputtering under mixed Ar-Ne atmospheres

Popis výsledku anglicky

B-C-N coatings have the potential to combine the properties of B4C, BN, CNx, and carbon structures, resulting in coatings with high hardness, low friction coefficient, high wear resistance, and high corrosion resistance, making them highly attractive for many applications as protective coatings. In this investigation, the impact of the Ar:Ne flow rate ratio used in the deposition process on the properties of Cr/CrN/B4C/B-C-N films was analyzed. The films were deposited by magnetron sputtering onto AISI M2 steel and silicon wafer substrates. The study focused on analyzing the influence of Ne addition to the working atmosphere on the bonding structure, chemical composition, and electrochemical behavior of the films. Scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD) techniques, Fourier transform infrared (FTIR) spectroscopy, and Xray photoelectron spectroscopy (XPS) were employed to determine the morphology, roughness, crystalline structure, BN phase fractions, atomic composition, and bonding states of the films. XRD analysis revealed that the B4C/B-C-N layers had an amorphous structure, while FTIR and XPS identified the presence of sp2 B-N, C=C, C-N, C=N, and B-O bonds within the films. Additionally, XPS studies demonstrated that higher Ne flow rate fractions (Ne70) increased nitrogen and boron content and reduced oxygen and carbon fractions, indicating enhanced nitrogen incorporation. Electrochemical tests were conducted on all samples and the uncoated metallic substrate in a 3.5 wt % NaCl solution as the electrolyte. These tests included open-circuit potential (OCP), electrochemical impedance spectroscopy (EIS), and potentiodynamic polarization (PD) measurements. The results showed that the Cr/CrN/B4C/B-C-N films deposited on AISI M2 steel exhibited superior corrosion resistance compared to the uncoated AISI M2 substrate. Notably, films deposited at higher Ne flow rate fractions exhibited 5.0-fold improved corrosion protection, attributed to lower porosity and denser microstructure.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

1879-2715

Svazek periodika

238

Číslo periodika v rámci svazku

114292

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

12

Strana od-do

—

Kód UT WoS článku

001461109200001

EID výsledku v databázi Scopus

2-s2.0-105001267712