A single target RF magnetron co-sputtered iron doped tin oxide films with pillars

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F11%3A10005060" target="_blank" >RIV/44555601:13440/11:10005060 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.sciencedirect.com/science?_ob=MiamiImageURL&_cid=271582&_user=640945&_pii=S0042207X1100008X&_check=y&_origin=&_coverDate=25-Feb-2011&view=c&wchp=dGLzVlV-zSkzV&md5=895382bc98fe0230ffda9edfc085b6d9/1-s2.0-S0042207X1100008X-main.pdf" target="_blank" >http://www.sciencedirect.com/science?_ob=MiamiImageURL&_cid=271582&_user=640945&_pii=S0042207X1100008X&_check=y&_origin=&_coverDate=25-Feb-2011&view=c&wchp=dGLzVlV-zSkzV&md5=895382bc98fe0230ffda9edfc085b6d9/1-s2.0-S0042207X1100008X-main.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2010.12.013" target="_blank" >10.1016/j.vacuum.2010.12.013</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A single target RF magnetron co-sputtered iron doped tin oxide films with pillars

Popis výsledku v původním jazyce

The SnO2 gas sensors and catalytic surfaces are produced by different techniques with a wide range of dopants improving their selectivity and sensitivities. The surface topology is important because the active surface area can be enlarged dramatically byemploying nanostructures. Many reported techniques for the tin oxide nanostructures preparation require fine powders or liquid precursors together with high temperatures above 500 degrees C. But the nanostructures can be formed by the RF off-axis magnetron sputtering technique at room temperature from a bulk target. The single target co-sputtering of SnO2 target with Fe inset was used to deposit SnO2 film doped by iron. The 400 nm diameter pillars were successfully deposited in controllable density onpolished Si substrates at low pressure 0.3 Pa of argon and oxygen gas mixture. The pillars were not formatted at the beginning of deposition process but certain SnO2 film was required. The surface around the pillars was flat without any s

Název v anglickém jazyce

A single target RF magnetron co-sputtered iron doped tin oxide films with pillars

Popis výsledku anglicky

The SnO2 gas sensors and catalytic surfaces are produced by different techniques with a wide range of dopants improving their selectivity and sensitivities. The surface topology is important because the active surface area can be enlarged dramatically byemploying nanostructures. Many reported techniques for the tin oxide nanostructures preparation require fine powders or liquid precursors together with high temperatures above 500 degrees C. But the nanostructures can be formed by the RF off-axis magnetron sputtering technique at room temperature from a bulk target. The single target co-sputtering of SnO2 target with Fe inset was used to deposit SnO2 film doped by iron. The 400 nm diameter pillars were successfully deposited in controllable density onpolished Si substrates at low pressure 0.3 Pa of argon and oxygen gas mixture. The pillars were not formatted at the beginning of deposition process but certain SnO2 film was required. The surface around the pillars was flat without any s

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BG - Jaderná, atomová a molekulová fyzika, urychlovače

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

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Svazek periodika

85

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

4

Strana od-do

871-874

Kód UT WoS článku

000289181700005

EID výsledku v databázi Scopus

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