Studium tenkých vrstev SnO2 připravených depozičními technikami za asistence plazmatu

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques

Popis výsledku v původním jazyce

Thin films of oxide materials have high potential for device applications. Development of gas sensors in last few years has shown an important interest in thin tin oxide films. The SnO2 is one of the most widely used materials for gas sensor applicationsdue to their good performance for a detection of oxidable gases. When SnO2 layers are used in gas sensors, some features can depend on many layer parameters as thickness, cluster size, roughness, etc. Since the properties of the material are strongly dependent on the procedure of preparation, different techniques have been employed to obtain SnO2 thin films [1, 2, 3, 4]. In this work we have studied surface properties and tructure of SnO2 thin films prepared both by plasma oxidation of the thin tin films [5] and by RF or DC magnetron reactive sputtering of tin target in oxygen + argon mixture tmosphere. Tin dioxide films were prepared by RF sputtering of SnO2 target using argon or oxygen as working gas, too.

Název v anglickém jazyce

Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques

Popis výsledku anglicky

Thin films of oxide materials have high potential for device applications. Development of gas sensors in last few years has shown an important interest in thin tin oxide films. The SnO2 is one of the most widely used materials for gas sensor applicationsdue to their good performance for a detection of oxidable gases. When SnO2 layers are used in gas sensors, some features can depend on many layer parameters as thickness, cluster size, roughness, etc. Since the properties of the material are strongly dependent on the procedure of preparation, different techniques have been employed to obtain SnO2 thin films [1, 2, 3, 4]. In this work we have studied surface properties and tructure of SnO2 thin films prepared both by plasma oxidation of the thin tin films [5] and by RF or DC magnetron reactive sputtering of tin target in oxygen + argon mixture tmosphere. Tin dioxide films were prepared by RF sputtering of SnO2 target using argon or oxygen as working gas, too.

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2007

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of 16th-Symposium on Application of Plasma Processes

ISBN

978-80-89186-13-6

ISSN

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e-ISSN

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Počet stran výsledku

2

Strana od-do

245-246

Název nakladatele

Comenius University Press

Místo vydání

Bratislava, Slovensko

Místo konání akce

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Datum konání akce

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Typ akce podle státní příslušnosti

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Kód UT WoS článku

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