Optical diagnostic as a simple and cheap tool for process control

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F02%3A24210031" target="_blank" >RIV/46747885:24210/02:24210031 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical diagnostic as a simple and cheap tool for process control

Popis výsledku v původním jazyce

The application of OES as a tool of analyses of an industrial plan operation conditions has been presented. For control of plasma processes reduction of data produced from OES is necessary. Chromatic monitoring has been proposed as a method for data reduction. Based on The chromatic modulation was successfully used for detection of gas composition changes in the nitrogen/hydrogen mixture, end-point detection during plasma etching in oxygen plasma. An investigation of the sensitivity limit of gas monitoring for process control in a down-stream microwave plasma will be presented. A low-cost robust spectrometer for industrial process control will be introduced. Some results of its operation in control of plasma process were presented.

Název v anglickém jazyce

Optical diagnostic as a simple and cheap tool for process control

Popis výsledku anglicky

The application of OES as a tool of analyses of an industrial plan operation conditions has been presented. For control of plasma processes reduction of data produced from OES is necessary. Chromatic monitoring has been proposed as a method for data reduction. Based on The chromatic modulation was successfully used for detection of gas composition changes in the nitrogen/hydrogen mixture, end-point detection during plasma etching in oxygen plasma. An investigation of the sensitivity limit of gas monitoring for process control in a down-stream microwave plasma will be presented. A low-cost robust spectrometer for industrial process control will be introduced. Some results of its operation in control of plasma process were presented.

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2002

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

3rd European Advanced Equipment Control /Advanced Process Control Conference

ISBN

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ISSN

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e-ISSN

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Počet stran výsledku

1

Strana od-do

117

Název nakladatele

Technologie Zentrum Dresden GmbH

Místo vydání

Dresden, Německo

Místo konání akce

Dresden, Německo

Datum konání akce

1. 1. 2002

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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