Experimentální a teoretická studie PECVD v modelu dutých substrátů.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F07%3A%40KMT0155" target="_blank" >RIV/46747885:24210/07:@KMT0155 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Experimental and theoretical study of PECVD in model of hollow substrates.

Popis výsledku v původním jazyce

This work is aimed at experimental and theoretical study of active particles behaviour during polymerization processes in RF plasma discharge in acetylene. In the work there are studied penetration processes of C2H2 radicals into the closed slot that hasbeen specially constructed for the purposes of these experiments. Consequential measurements were taken on the layers deposited by the PECVD method in the substrate slot. The layer's thickness on the substrate surface was measured by the optical profilometer after the deposition process. In order to confirm the experimental results, the problem has been studied by computer simulations, too. Therefore, threedimensional model of the diffusion type has been created and the set of differential equations was solved by the powerful and in the last decade popular finite element method (FEM).

Název v anglickém jazyce

Experimental and theoretical study of PECVD in model of hollow substrates.

Popis výsledku anglicky

This work is aimed at experimental and theoretical study of active particles behaviour during polymerization processes in RF plasma discharge in acetylene. In the work there are studied penetration processes of C2H2 radicals into the closed slot that hasbeen specially constructed for the purposes of these experiments. Consequential measurements were taken on the layers deposited by the PECVD method in the substrate slot. The layer's thickness on the substrate surface was measured by the optical profilometer after the deposition process. In order to confirm the experimental results, the problem has been studied by computer simulations, too. Therefore, threedimensional model of the diffusion type has been created and the set of differential equations was solved by the powerful and in the last decade popular finite element method (FEM).

Druh

D - Stať ve sborníku

CEP obor

JK - Koroze a povrchové úpravy materiálu

OECD FORD obor

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Projekt

<a href="/cs/project/1M0577" target="_blank" >1M0577: Výzkumné centrum pro nanopovrchové inženýrství</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2007

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

XXVIII International Conference on Phenomena in Ionized Gases (ICPIG)

ISBN

978-80-87026-01-4

ISSN

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e-ISSN

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Počet stran výsledku

4

Strana od-do

717-720

Název nakladatele

Institute of Plasma Physics AS CR

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

15. 7. 2007

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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