Studium penetrace aktivních částic metodou PECVD

Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F07%3A00008074" target="_blank" >RIV/60076658:12410/07:00008074 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Jazyk výsledku
angličtina
Název v původním jazyce
Study of active particles penetration by PECVD method
Popis výsledku v původním jazyce
In this work behavior of active particles during process of plasma polymerization by PECVD method was investigated. Experimental and theoretical part of the study were carried out simultaneously. Measurements were taken on the specially constructed closed-slot substrate. Thanks to this substrate design, penetration of the active particles during the deposition could be measured. Theoretical part consisted of the mathematical model developement and its implementation as a computer simulation.
Název v anglickém jazyce
Study of active particles penetration by PECVD method
Popis výsledku anglicky
In this work behavior of active particles during process of plasma polymerization by PECVD method was investigated. Experimental and theoretical part of the study were carried out simultaneously. Measurements were taken on the specially constructed closed-slot substrate. Thanks to this substrate design, penetration of the active particles during the deposition could be measured. Theoretical part consisted of the mathematical model developement and its implementation as a computer simulation.

Projekt
<a href="/cs/project/KAN101120701" target="_blank" >KAN101120701: Nanokompozitní vrstvy a nanočástice vytvářené v nízkotlakém plazmatu pro povrchové modifikace</a><br>
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění
2007
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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