Measurement of thermal properties of thin films up to high temperatures - pulsed photothermal radiometry system and Si-B-C-N films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F10%3A00503774" target="_blank" >RIV/49777513:23520/10:00503774 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of thermal properties of thin films up to high temperatures - pulsed photothermal radiometry system and Si-B-C-N films

Popis výsledku v původním jazyce

A new arrangement of two-detector pulsed photothermal radiometry measurement system has been developed enabling temperature dependence measurement of thermal properties of thin films up to high temperatures. The system enables simultaneous determinationof the thin film effusivity, thermal conductivity, and volumetric specific heat in the temperature range from room temperature to 600 °C. The samples are placed in a vacuum chamber. The temperatures in the system were verified by an independent measurement and the system was tested on known bulk samples. Advantages and shortcomings of the method are described and discussed. Furthermore, Si-B-C-N thin films were studied. These amorphous ceramic materials possess an interesting set of mechanical and thermal properties. In the studied temperature range, from 20 to 600 °C, both the thermal conductivity and volumetric specific heat increased with increasing temperature.

Název v anglickém jazyce

Measurement of thermal properties of thin films up to high temperatures - pulsed photothermal radiometry system and Si-B-C-N films

Popis výsledku anglicky

A new arrangement of two-detector pulsed photothermal radiometry measurement system has been developed enabling temperature dependence measurement of thermal properties of thin films up to high temperatures. The system enables simultaneous determinationof the thin film effusivity, thermal conductivity, and volumetric specific heat in the temperature range from room temperature to 600 °C. The samples are placed in a vacuum chamber. The temperatures in the system were verified by an independent measurement and the system was tested on known bulk samples. Advantages and shortcomings of the method are described and discussed. Furthermore, Si-B-C-N thin films were studied. These amorphous ceramic materials possess an interesting set of mechanical and thermal properties. In the studied temperature range, from 20 to 600 °C, both the thermal conductivity and volumetric specific heat increased with increasing temperature.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BJ - Termodynamika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Review of Scientific Instruments

ISSN

0034-6748

e-ISSN

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Svazek periodika

81

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

7

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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