Optical layer development for thin films thermal conductivity measurement by pulsed photothermal radiometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F15%3A43924866" target="_blank" >RIV/49777513:23640/15:43924866 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1063/1.4904876" target="_blank" >http://dx.doi.org/10.1063/1.4904876</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1063/1.4904876" target="_blank" >10.1063/1.4904876</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical layer development for thin films thermal conductivity measurement by pulsed photothermal radiometry

Popis výsledku v původním jazyce

Measurement of thermal conductivity and volumetric specific heat of optically transparent thin films present a challenge for optical based measurement methods like pulsed photothermal radiometry. We present two approaches: (i) addition of an opaque optical layer to the surface and (ii) approximate correction of the mathematical model to incorporate semitransparency of the film. Tested were different single layer and multilayer additive optical layers. Presented are thermal properties measurements results for 6 different thin films with wide range of thermal conductivity in three configurations of surface: as deposited, added Ti layer and added Ti/TiAlSiN layer. Measurements were done in dependence on temperature from room temperature to 500oC. Suitability of different measurement configurations is discussed and results of high temperature testing of different optical layers are presented.

Název v anglickém jazyce

Optical layer development for thin films thermal conductivity measurement by pulsed photothermal radiometry

Popis výsledku anglicky

Measurement of thermal conductivity and volumetric specific heat of optically transparent thin films present a challenge for optical based measurement methods like pulsed photothermal radiometry. We present two approaches: (i) addition of an opaque optical layer to the surface and (ii) approximate correction of the mathematical model to incorporate semitransparency of the film. Tested were different single layer and multilayer additive optical layers. Presented are thermal properties measurements results for 6 different thin films with wide range of thermal conductivity in three configurations of surface: as deposited, added Ti layer and added Ti/TiAlSiN layer. Measurements were done in dependence on temperature from room temperature to 500oC. Suitability of different measurement configurations is discussed and results of high temperature testing of different optical layers are presented.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BJ - Termodynamika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Review of Scientific Instruments

ISSN

0034-6748

e-ISSN

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Svazek periodika

86

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

"14902-1-1"-"14902-9"

Kód UT WoS článku

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EID výsledku v databázi Scopus

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