Electrical and optical characteristics of boron doped nanocrystalline diamond films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00511026" target="_blank" >RIV/68378271:_____/19:00511026 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.vacuum.2019.108813" target="_blank" >https://doi.org/10.1016/j.vacuum.2019.108813</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2019.108813" target="_blank" >10.1016/j.vacuum.2019.108813</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Electrical and optical characteristics of boron doped nanocrystalline diamond films

Popis výsledku v původním jazyce

Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.n

Název v anglickém jazyce

Electrical and optical characteristics of boron doped nanocrystalline diamond films

Popis výsledku anglicky

Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.n

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

—

Svazek periodika

168

Číslo periodika v rámci svazku

Oct

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

4

Strana od-do

1-4

Kód UT WoS článku

000490044200006

EID výsledku v databázi Scopus

2-s2.0-85069544376