Physical and mechanical properties of Ti/Al multilayer heat releasing coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F15%3A43925573" target="_blank" >RIV/49777513:23520/15:43925573 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1504/IJNM.2015.070525" target="_blank" >http://dx.doi.org/10.1504/IJNM.2015.070525</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1504/IJNM.2015.070525" target="_blank" >10.1504/IJNM.2015.070525</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Physical and mechanical properties of Ti/Al multilayer heat releasing coatings

Popis výsledku v původním jazyce

The paper reports on physical and mechanical properties of sputtered Ti/Al multilayer coatings with a bilayer thickness Lambda ranging from 2 to 172 nm releasing heat during annealing. The temperature Thr at which the heat is released during reaction between Al and Ti atoms is investigated. It was found that: 1) Thr: a) decreases from ~420 to 390 oC for the coatings with Lambda decreasing from 172 to 17 nm; b) ranges from ~480 to ~600 oC for the coatings with Lambda LESS-THAN OR EQUAL TO 12 nm; 2) the heat DeltaH(Ti/Al) evolved in the reaction increases from 5 to 35 kJ/mol with increasing Lambda. Besides, it is shown that: 1) the heat can be released also during one pulse of the rapid thermal annealing up to 600 oC with heating rate 100 oC/s; 2) the released heat results in a strong interaction of the Ti/Al multilayer coating with Si substrate. The mechanical properties of the as-deposited Ti/Al multilayer coatings are also given.

Název v anglickém jazyce

Physical and mechanical properties of Ti/Al multilayer heat releasing coatings

Popis výsledku anglicky

The paper reports on physical and mechanical properties of sputtered Ti/Al multilayer coatings with a bilayer thickness Lambda ranging from 2 to 172 nm releasing heat during annealing. The temperature Thr at which the heat is released during reaction between Al and Ti atoms is investigated. It was found that: 1) Thr: a) decreases from ~420 to 390 oC for the coatings with Lambda decreasing from 172 to 17 nm; b) ranges from ~480 to ~600 oC for the coatings with Lambda LESS-THAN OR EQUAL TO 12 nm; 2) the heat DeltaH(Ti/Al) evolved in the reaction increases from 5 to 35 kJ/mol with increasing Lambda. Besides, it is shown that: 1) the heat can be released also during one pulse of the rapid thermal annealing up to 600 oC with heating rate 100 oC/s; 2) the released heat results in a strong interaction of the Ti/Al multilayer coating with Si substrate. The mechanical properties of the as-deposited Ti/Al multilayer coatings are also given.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Tvrdé nanokompozitní vrstvy se zvýšenou houževnatostí a unikátními vlastnostmi</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

International Journal of Nanomanufacturing

ISSN

1746-9392

e-ISSN

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Svazek periodika

11

Číslo periodika v rámci svazku

1-2

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

16

Strana od-do

78-93

Kód UT WoS článku

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EID výsledku v databázi Scopus

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