Thermal stability of structure, microstructure and enhanced properties of Zr–Ta–O films with a low and high Ta content

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F18%3A43949543" target="_blank" >RIV/49777513:23520/18:43949543 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2017.12.026" target="_blank" >https://doi.org/10.1016/j.surfcoat.2017.12.026</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.12.026" target="_blank" >10.1016/j.surfcoat.2017.12.026</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Thermal stability of structure, microstructure and enhanced properties of Zr–Ta–O films with a low and high Ta content

Popis výsledku v původním jazyce

The paper reports on the thermal stability of two ternary Zr–Ta–O films (Zr25Ta5O70, Ta25Zr5O70) and two binary oxide films (ZrO2, Ta2O5) prepared by reactive high-power impulse magnetron sputtering using a pulsed reactive gas flow control. The thermal stability of the structure, microstructure, mechanical and optical properties of the films was investigated in air in the temperature range of 650 °C – 1300 °C. It was found that both ternary Zr–Ta–O films investigated exhibit an enhanced thermal stability of the as-deposited structure and enhanced properties compared to the corresponding binary oxides. The Zr25Ta5O70 film is a single-phase material with a nanocrystalline structure corresponding to the TaZr2.75O8 compound. This phase is stable up to the maximum temperature investigated (1300 °C) and the film retains a high hardness (19 GPa) and refractive index (2.25) even after the annealing to 1000 °C in air. The Ta25Zr5O70 film exhibits an amorphous structure in the as-deposited state with its thermal stability up to 800 °C, which is about 100 °C more than for the Ta2O5 film.

Název v anglickém jazyce

Thermal stability of structure, microstructure and enhanced properties of Zr–Ta–O films with a low and high Ta content

Popis výsledku anglicky

The paper reports on the thermal stability of two ternary Zr–Ta–O films (Zr25Ta5O70, Ta25Zr5O70) and two binary oxide films (ZrO2, Ta2O5) prepared by reactive high-power impulse magnetron sputtering using a pulsed reactive gas flow control. The thermal stability of the structure, microstructure, mechanical and optical properties of the films was investigated in air in the temperature range of 650 °C – 1300 °C. It was found that both ternary Zr–Ta–O films investigated exhibit an enhanced thermal stability of the as-deposited structure and enhanced properties compared to the corresponding binary oxides. The Zr25Ta5O70 film is a single-phase material with a nanocrystalline structure corresponding to the TaZr2.75O8 compound. This phase is stable up to the maximum temperature investigated (1300 °C) and the film retains a high hardness (19 GPa) and refractive index (2.25) even after the annealing to 1000 °C in air. The Ta25Zr5O70 film exhibits an amorphous structure in the as-deposited state with its thermal stability up to 800 °C, which is about 100 °C more than for the Ta2O5 film.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/GA16-18183S" target="_blank" >GA16-18183S: Pokročilé povrchové povlaky se zlepšenými vlastnostmi a teplotní stabilitou</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

335

Číslo periodika v rámci svazku

15 February 2018

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

9

Strana od-do

95-103

Kód UT WoS článku

000424720800011

EID výsledku v databázi Scopus

2-s2.0-85038809274