Preparation of tungsten oxide thin films using reactive HiPIMS: Process and material

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Preparation of tungsten oxide thin films using reactive HiPIMS: Process and material

Popis výsledku v původním jazyce

Nowadays, tungsten oxide is widely studied as a promising material for hydrogen gas sensing, electrochromic or photocatalytic applications. However, there are only few works focused on utilization of reactive HiPIMS (high-power impulse magnetron sputtering) process for WOx films preparation. Despite the fact, reactive HiPIMS could enhance deposition rate or allow to prepare quality oxide films at low temperature. In this work, we present results obtained during reactive HiPIMS deposition of thin WOx film with different stoichiometry and structure. Effect of oxygen partial pressure, value of pulse-averaged target power density and pulse length will be discussed. Results obtained from an improved version of our global model of reactive HiPIMS will be also presented. Hydrogen sensing response will be shown for selected films. It is demonstrated, sensitivity towards hydrogen gas is highly increased for a proper nanostructure.

Název v anglickém jazyce

Preparation of tungsten oxide thin films using reactive HiPIMS: Process and material

Popis výsledku anglicky

Nowadays, tungsten oxide is widely studied as a promising material for hydrogen gas sensing, electrochromic or photocatalytic applications. However, there are only few works focused on utilization of reactive HiPIMS (high-power impulse magnetron sputtering) process for WOx films preparation. Despite the fact, reactive HiPIMS could enhance deposition rate or allow to prepare quality oxide films at low temperature. In this work, we present results obtained during reactive HiPIMS deposition of thin WOx film with different stoichiometry and structure. Effect of oxygen partial pressure, value of pulse-averaged target power density and pulse length will be discussed. Results obtained from an improved version of our global model of reactive HiPIMS will be also presented. Hydrogen sensing response will be shown for selected films. It is demonstrated, sensitivity towards hydrogen gas is highly increased for a proper nanostructure.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů