Nanostructured CuO/WO3 thin films for Hydrogen Gas Sensing Prepared by Advanced Magnetron Sputtering Techniques

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43963136" target="_blank" >RIV/49777513:23520/21:43963136 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Nanostructured CuO/WO3 thin films for Hydrogen Gas Sensing Prepared by Advanced Magnetron Sputtering Techniques

Popis výsledku v původním jazyce

Various architectures of hydrogen sensing multilayers were designed using various combinations of thin films and nanoclusters of both CuO and WO3. Thin films were prepared using reactive sputter deposition in dc magnetron regime (WO3) or rf mode (CuO). The nanoclusters were prepared by magnetron-based gas aggregation cluster source which enabled controlling of size and composition of clusters. There are several architectures described in this work. The combination of two thin films. Decoration of one support film with clusters or thin films overlaying the clusters. By switching the materials in these configurations, various nanostructures were achieved. The sensorial behavior of prepared materials was studied towards hydrogen gas in synthetic air in a form of thin-film conductometric sensor. The enhancement of the response of WO3 thin film alone by adding the CuO film on top is described as well as the influence of the amount of nanoclusters deposited on WO3 thin films. On the basis of the SEM imaging, sensorial behavior analysis, XRD and resistivity measurements, we propose that the sensing mechanism is always based on the formation of heterojunction in between n-type WO3, p-type CuO or other phases present in the structures (such as n-type CuWO4).

Název v anglickém jazyce

Nanostructured CuO/WO3 thin films for Hydrogen Gas Sensing Prepared by Advanced Magnetron Sputtering Techniques

Popis výsledku anglicky

Various architectures of hydrogen sensing multilayers were designed using various combinations of thin films and nanoclusters of both CuO and WO3. Thin films were prepared using reactive sputter deposition in dc magnetron regime (WO3) or rf mode (CuO). The nanoclusters were prepared by magnetron-based gas aggregation cluster source which enabled controlling of size and composition of clusters. There are several architectures described in this work. The combination of two thin films. Decoration of one support film with clusters or thin films overlaying the clusters. By switching the materials in these configurations, various nanostructures were achieved. The sensorial behavior of prepared materials was studied towards hydrogen gas in synthetic air in a form of thin-film conductometric sensor. The enhancement of the response of WO3 thin film alone by adding the CuO film on top is described as well as the influence of the amount of nanoclusters deposited on WO3 thin films. On the basis of the SEM imaging, sensorial behavior analysis, XRD and resistivity measurements, we propose that the sensing mechanism is always based on the formation of heterojunction in between n-type WO3, p-type CuO or other phases present in the structures (such as n-type CuWO4).

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů