Ion and atom fluxes during HiPIMS deposition of NbC from a compound target

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43969229" target="_blank" >RIV/49777513:23520/23:43969229 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Ion and atom fluxes during HiPIMS deposition of NbC from a compound target

Popis výsledku v původním jazyce

Sputtered element ratio (Nb/C) in films deposited from a compound NbC target by non-reactive high power impulse magnetron sputtering (HiPIMS) operated at different frequencies and duty cycles have been investigated. Time-averaged mass spectrometry shows that the fluxes of sputtered target ions increase with increasing pulse power density (and decreasing pulse length) due to increasing the electron density and, hence, electron-impact ionization probability. Since Nb atoms have lower ionization energy and larger ionization cross-section than C atoms, the Nb ions dominate the flux of ions onto the film at all conditions. Neutrals were monitored by optical emission spectroscopy (OES) and showed a decrease by increasing pulse power density. In the case of 500 Hz, the Nb/C ratio varied from 0.6 to 0.95 by adjusting the length of HiPIMS pulses between 200 μs and 30 μs, achieving nearly stoichiometric composition for the lowest pulse length.

Název v anglickém jazyce

Ion and atom fluxes during HiPIMS deposition of NbC from a compound target

Popis výsledku anglicky

Sputtered element ratio (Nb/C) in films deposited from a compound NbC target by non-reactive high power impulse magnetron sputtering (HiPIMS) operated at different frequencies and duty cycles have been investigated. Time-averaged mass spectrometry shows that the fluxes of sputtered target ions increase with increasing pulse power density (and decreasing pulse length) due to increasing the electron density and, hence, electron-impact ionization probability. Since Nb atoms have lower ionization energy and larger ionization cross-section than C atoms, the Nb ions dominate the flux of ions onto the film at all conditions. Neutrals were monitored by optical emission spectroscopy (OES) and showed a decrease by increasing pulse power density. In the case of 500 Hz, the Nb/C ratio varied from 0.6 to 0.95 by adjusting the length of HiPIMS pulses between 200 μs and 30 μs, achieving nearly stoichiometric composition for the lowest pulse length.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů