Detailed pathway for a fast low-temperature synthesis of strongly thermochromic W-doped VO2 films with a low transition temperature

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43969360" target="_blank" >RIV/49777513:23520/23:43969360 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1088/1361-6463/acf86b" target="_blank" >https://doi.org/10.1088/1361-6463/acf86b</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/acf86b" target="_blank" >10.1088/1361-6463/acf86b</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Detailed pathway for a fast low-temperature synthesis of strongly thermochromic W-doped VO2 films with a low transition temperature

Popis výsledku v původním jazyce

We report the discharge characteristics, and population of chosen atomic neutral (V, O and Ar) and ionic (V+, V2+, O+, and Ar+) species in the discharge during low-temperature (350 °C) depositions of W-doped VOx films onto a 170 nm thick Y-stabilized ZrO2 layer on a 1 mm thick conventional soda-lime glass. The depositions were performed using reactive deep oscillation magnetron sputtering with a pulsed O2 flow control and to-substrate O2 injection into a high-density plasma in front of the sputter V-W target. The pre-selected critical values of the oxygen partial pressure were in the range from 82 mPa to 92 mPa. Optical emission spectroscopy proved a relatively high density of O atoms in front of the substrate, which is important to produce the W-doped VO2 films. It was found that the setting of the amount of O2 in the gas mixture determines not only the elemental and phase composition of the films and their deposition rate but also the crystallinity of the thermochromic VO2 phase in them. The crystalline W-doped VO2 films with a low transition temperature of 28 °C exhibited a high modulation of the solar energy transmittance of 8.9%. The results are important for further improvement of this new scalable sputter deposition technique for a fast (53 nm/min at a target-substrate distance of 100 mm in this work) low-temperature synthesis of high-performance durable thermochromic VO2-based multilayer coatings designed for smart-window applications.

Název v anglickém jazyce

Detailed pathway for a fast low-temperature synthesis of strongly thermochromic W-doped VO2 films with a low transition temperature

Popis výsledku anglicky

We report the discharge characteristics, and population of chosen atomic neutral (V, O and Ar) and ionic (V+, V2+, O+, and Ar+) species in the discharge during low-temperature (350 °C) depositions of W-doped VOx films onto a 170 nm thick Y-stabilized ZrO2 layer on a 1 mm thick conventional soda-lime glass. The depositions were performed using reactive deep oscillation magnetron sputtering with a pulsed O2 flow control and to-substrate O2 injection into a high-density plasma in front of the sputter V-W target. The pre-selected critical values of the oxygen partial pressure were in the range from 82 mPa to 92 mPa. Optical emission spectroscopy proved a relatively high density of O atoms in front of the substrate, which is important to produce the W-doped VO2 films. It was found that the setting of the amount of O2 in the gas mixture determines not only the elemental and phase composition of the films and their deposition rate but also the crystallinity of the thermochromic VO2 phase in them. The crystalline W-doped VO2 films with a low transition temperature of 28 °C exhibited a high modulation of the solar energy transmittance of 8.9%. The results are important for further improvement of this new scalable sputter deposition technique for a fast (53 nm/min at a target-substrate distance of 100 mm in this work) low-temperature synthesis of high-performance durable thermochromic VO2-based multilayer coatings designed for smart-window applications.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/GA21-28277S" target="_blank" >GA21-28277S: Vysoce účinné termochromické povlaky na bázi VO2 s nízkou přechodovou teplotou připravené pomocí reaktivního pulzního plazmatu</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

JOURNAL OF PHYSICS D-APPLIED PHYSICS

ISSN

0022-3727

e-ISSN

1361-6463

Svazek periodika

56

Číslo periodika v rámci svazku

50

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

001069488800001

EID výsledku v databázi Scopus

2-s2.0-85173294023