Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F24%3A43972202" target="_blank" >RIV/49777513:23520/24:43972202 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1088/1361-6595/ad56c7" target="_blank" >https://doi.org/10.1088/1361-6595/ad56c7</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/ad56c7" target="_blank" >10.1088/1361-6595/ad56c7</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS

Popis výsledku v původním jazyce

The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons accumulated behind the magnetic trap are prevented from reaching the positive target. Consequently, a space charge double layer (DL) is formed between the positive target and the plasma behind the magnetic trap, leading to electron acceleration across the DL and RD ignition. This study reveals the significant impact of the magnetic field configuration on RD ignition. Experiments are performed using a Ti target involving magnetic field variation, wire probe measurements of floating potential, and optical emission spectroscopy imaging. It is found that adjusting the magnetic field to a more balanced configuration leads to earlier RD ignition, while a more unbalanced one delays or even prevents it. Specifically, the time of RD ignition decreases with an increase in the magnetic null point distance from the target. Moreover, the size and shape of optical emission in the RD varies with nearby probe placement, suggesting sensitivity to external electrodes.

Název v anglickém jazyce

Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS

Popis výsledku anglicky

The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons accumulated behind the magnetic trap are prevented from reaching the positive target. Consequently, a space charge double layer (DL) is formed between the positive target and the plasma behind the magnetic trap, leading to electron acceleration across the DL and RD ignition. This study reveals the significant impact of the magnetic field configuration on RD ignition. Experiments are performed using a Ti target involving magnetic field variation, wire probe measurements of floating potential, and optical emission spectroscopy imaging. It is found that adjusting the magnetic field to a more balanced configuration leads to earlier RD ignition, while a more unbalanced one delays or even prevents it. Specifically, the time of RD ignition decreases with an increase in the magnetic null point distance from the target. Moreover, the size and shape of optical emission in the RD varies with nearby probe placement, suggesting sensitivity to external electrodes.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/EH22_008%2F0004572" target="_blank" >EH22_008/0004572: Kvantové materiály pro aplikace v udržitelných technologiích</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

PLASMA SOURCES SCIENCE &amp; TECHNOLOGY

ISSN

0963-0252

e-ISSN

1361-6595

Svazek periodika

33

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

—

Kód UT WoS článku

001250762000001

EID výsledku v databázi Scopus

2-s2.0-85196818064