Effect of magnetic field on reverse discharge ignition in bipolar HiPIMS

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Effect of magnetic field on reverse discharge ignition in bipolar HiPIMS

Popis výsledku v původním jazyce

The phenomenon of reverse discharge (RD) in bipolar HiPIMS occurs when a sufficiently long positive pulse is applied, forming a double-layer structure. This double-layer is created by secondary electron emission caused by Ar+ ions hitting grounded surfaces, along with the magnetic mirror effect from the magnetron’s magnetic field. The magnetic field traps electrons in the bulk plasma, preventing them from reaching the magnetron and causing them to accumulate, eventually leading to RD ignition. The configuration of the magnetic field plays a crucial role in influencing the plasma potential distribution and the occurrence of RD. Experiments with a Ti target revealed that RD ignition can be detected by monitoring floating potentials with a wire probe. A balanced magnetic field causes RD to ignite sooner, while an unbalanced field delays or prevents it. RD can be managed by adjusting the magnetic field and using shorter positive pulses. This study underscores the impact of magnetic field configuration on RD during bipolar HiPIMS discharge.

Název v anglickém jazyce

Effect of magnetic field on reverse discharge ignition in bipolar HiPIMS

Popis výsledku anglicky

The phenomenon of reverse discharge (RD) in bipolar HiPIMS occurs when a sufficiently long positive pulse is applied, forming a double-layer structure. This double-layer is created by secondary electron emission caused by Ar+ ions hitting grounded surfaces, along with the magnetic mirror effect from the magnetron’s magnetic field. The magnetic field traps electrons in the bulk plasma, preventing them from reaching the magnetron and causing them to accumulate, eventually leading to RD ignition. The configuration of the magnetic field plays a crucial role in influencing the plasma potential distribution and the occurrence of RD. Experiments with a Ti target revealed that RD ignition can be detected by monitoring floating potentials with a wire probe. A balanced magnetic field causes RD to ignite sooner, while an unbalanced field delays or prevents it. RD can be managed by adjusting the magnetic field and using shorter positive pulses. This study underscores the impact of magnetic field configuration on RD during bipolar HiPIMS discharge.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů