Helium-Assisted Glancing Angle Deposition of Thin Films of TiCuOx and WOx for Conductometric Hydrogen Sensing

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F24%3A43972649" target="_blank" >RIV/49777513:23520/24:43972649 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/49777513:23520/24:43972654 RIV/49777513:23520/24:43973139

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Helium-Assisted Glancing Angle Deposition of Thin Films of TiCuOx and WOx for Conductometric Hydrogen Sensing

Popis výsledku v původním jazyce

In the quest for efficient hydrogen detection, the limitations of current sensors – such as low sensitivity and selectivity – pose significant challenges. Advancements in hydrogen sensing materials and techniques are essential to improve safety and efficiency. This study pioneers a novel helium-assisted sputter deposition technique for TiCuOx and WOx films, targeting enhancement of active surface area and therefore improvement of sensing performance. We also describe how a helium-rich working atmosphere induces changes in the structure of the thin films. TiCuOx films were deposited using conventional DC magnetron sputtering, employing a circular titanium target with adjacent copper strip in various working gas mixtures of argon, helium, and oxygen, with fixed value of total pressure of approximately 520 mPa. The glancing angle deposition (GLAD) technique was initially employed to induce a columnar nanostructure, increasing the films&apos; surface roughness and porosity and thereby enhancing hydrogen interaction. Accompanying GLAD, helium was introduced as a replacement for part of argon to modify the TiCuOx films&apos; surface characteristics further.

Název v anglickém jazyce

Helium-Assisted Glancing Angle Deposition of Thin Films of TiCuOx and WOx for Conductometric Hydrogen Sensing

Popis výsledku anglicky

In the quest for efficient hydrogen detection, the limitations of current sensors – such as low sensitivity and selectivity – pose significant challenges. Advancements in hydrogen sensing materials and techniques are essential to improve safety and efficiency. This study pioneers a novel helium-assisted sputter deposition technique for TiCuOx and WOx films, targeting enhancement of active surface area and therefore improvement of sensing performance. We also describe how a helium-rich working atmosphere induces changes in the structure of the thin films. TiCuOx films were deposited using conventional DC magnetron sputtering, employing a circular titanium target with adjacent copper strip in various working gas mixtures of argon, helium, and oxygen, with fixed value of total pressure of approximately 520 mPa. The glancing angle deposition (GLAD) technique was initially employed to induce a columnar nanostructure, increasing the films&apos; surface roughness and porosity and thereby enhancing hydrogen interaction. Accompanying GLAD, helium was introduced as a replacement for part of argon to modify the TiCuOx films&apos; surface characteristics further.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů