Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F09%3A00501778" target="_blank" >RIV/49777513:23640/09:00501778 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

Popis výsledku v původním jazyce

This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated.

Název v anglickém jazyce

Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

Popis výsledku anglicky

This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/1M06031" target="_blank" >1M06031: Materiály a komponenty pro ochranu životního prostředí</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Electrical Engineering

ISSN

1335-3632

e-ISSN

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Svazek periodika

60

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

SK - Slovenská republika

Počet stran výsledku

4

Strana od-do

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Kód UT WoS článku

000271846100008

EID výsledku v databázi Scopus

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