A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F10%3A00503192" target="_blank" >RIV/49777513:23640/10:00503192 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness

Popis výsledku v původním jazyce

We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and under moderate hydrogen dilution of silane. Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine theTauc optical band-gap energies Eg, the B factors of the Tauc plots, the iso-energy values E 04 (energy at which the absorption coefficient is equal to 10 4 cm-1). The results were correlated with volume fractions of the amorphous phase and voids and withthe film thickness.

Název v anglickém jazyce

A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness

Popis výsledku anglicky

We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and under moderate hydrogen dilution of silane. Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine theTauc optical band-gap energies Eg, the B factors of the Tauc plots, the iso-energy values E 04 (energy at which the absorption coefficient is equal to 10 4 cm-1). The results were correlated with volume fractions of the amorphous phase and voids and withthe film thickness.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/1M06031" target="_blank" >1M06031: Materiály a komponenty pro ochranu životního prostředí</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

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Svazek periodika

256

Číslo periodika v rámci svazku

18

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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