Pulsed laser deposition of ZnO in N2O atmosphere

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F10%3A00503426" target="_blank" >RIV/49777513:23640/10:00503426 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Pulsed laser deposition of ZnO in N2O atmosphere

Popis výsledku v původním jazyce

The contribution deals with ZnO thin layers doped by nitrogen which were prepared by pulsed laser deposition in N2O ambient atmosphere. Our approach is based on ablation of undoped ZnO target in active atmosphere containing N2O gas without any supportingexcitation equipment in parallel. Ablation of ZnO target was performed at different pressures (from 1 to 32 Pa) of N2O ambient atmosphere by pulsed Nd:YAG laser (at 355 nm). Layers of ZnO were grown on different substrates (Si, sapphire, fused silica) and their properties were investigated by various analytical methods: scanning electron microscopy (SEM), secondary ion mass spectroscopy (SIMS), X-ray diffraction (XRD), and optical transmission spectroscopy. The results confirmed incorporation of nitrogen into ZnO layers and its concentration was pressure dependent. According to SIMS analysis, there is a certain pressure level (above 10 Pa) when the presence of N becomes negligible. Transmittance spectra showed increasing of the optical

Název v anglickém jazyce

Pulsed laser deposition of ZnO in N2O atmosphere

Popis výsledku anglicky

The contribution deals with ZnO thin layers doped by nitrogen which were prepared by pulsed laser deposition in N2O ambient atmosphere. Our approach is based on ablation of undoped ZnO target in active atmosphere containing N2O gas without any supportingexcitation equipment in parallel. Ablation of ZnO target was performed at different pressures (from 1 to 32 Pa) of N2O ambient atmosphere by pulsed Nd:YAG laser (at 355 nm). Layers of ZnO were grown on different substrates (Si, sapphire, fused silica) and their properties were investigated by various analytical methods: scanning electron microscopy (SEM), secondary ion mass spectroscopy (SIMS), X-ray diffraction (XRD), and optical transmission spectroscopy. The results confirmed incorporation of nitrogen into ZnO layers and its concentration was pressure dependent. According to SIMS analysis, there is a certain pressure level (above 10 Pa) when the presence of N becomes negligible. Transmittance spectra showed increasing of the optical

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/1M06031" target="_blank" >1M06031: Materiály a komponenty pro ochranu životního prostředí</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Physics A - Materials Science & Processing

ISSN

0947-8396

e-ISSN

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Svazek periodika

101

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

5

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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