Comparative study of ZnO thin film prepared by pulsed laser deposition - Comparison of influence of different ablative lasers

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F17%3A43931689" target="_blank" >RIV/49777513:23640/17:43931689 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.vacuum.2016.09.013" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2016.09.013</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2016.09.013" target="_blank" >10.1016/j.vacuum.2016.09.013</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Comparative study of ZnO thin film prepared by pulsed laser deposition - Comparison of influence of different ablative lasers

Popis výsledku v původním jazyce

The contribution deals with transparent conductive oxides based on ZnO, which were prepared by Pulsed Laser Deposition (PLD) and their different properties are compared in the scope of the applied ablating lasers: (1) a solid state Nd:YAG laser working at third harmonic generation (wavelength 355 nm, 15 ns pulse length and 10 Hz pulsing frequency) and (2) an excimer laser working with KrF gas composition (248 nm, 20 ns and 10 Hz). The first part of the study deals with the influence of the oxygen pressure on crystallographic parameters of undoped ZnO films and the pressure interval between 2 and 5 Pa was assessed as an optimum. Moreover, the influence of different doping elements, aluminum and gallium, respectively, were analyzed. The results showed that a small amount (∼0.15% wt. content) of Al (or Ga, respectively) substantially improved carrier concentration with adequate resistivity decrease. Furthermore, optical properties: – transmittances and energy band-gap shift were investigated. Comparison between applied lasers revealed a substantially positive effect on electrical properties for the excimer laser.

Název v anglickém jazyce

Comparative study of ZnO thin film prepared by pulsed laser deposition - Comparison of influence of different ablative lasers

Popis výsledku anglicky

The contribution deals with transparent conductive oxides based on ZnO, which were prepared by Pulsed Laser Deposition (PLD) and their different properties are compared in the scope of the applied ablating lasers: (1) a solid state Nd:YAG laser working at third harmonic generation (wavelength 355 nm, 15 ns pulse length and 10 Hz pulsing frequency) and (2) an excimer laser working with KrF gas composition (248 nm, 20 ns and 10 Hz). The first part of the study deals with the influence of the oxygen pressure on crystallographic parameters of undoped ZnO films and the pressure interval between 2 and 5 Pa was assessed as an optimum. Moreover, the influence of different doping elements, aluminum and gallium, respectively, were analyzed. The results showed that a small amount (∼0.15% wt. content) of Al (or Ga, respectively) substantially improved carrier concentration with adequate resistivity decrease. Furthermore, optical properties: – transmittances and energy band-gap shift were investigated. Comparison between applied lasers revealed a substantially positive effect on electrical properties for the excimer laser.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/LO1402" target="_blank" >LO1402: CENTEM+</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

—

Svazek periodika

138

Číslo periodika v rámci svazku

APR 2017

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

184-190

Kód UT WoS článku

000395611600028

EID výsledku v databázi Scopus

2-s2.0-85013175289