Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A_____%2F02%3A00004031" target="_blank" >RIV/60076658:_____/02:00004031 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.

Popis výsledku v původním jazyce

In recent years the plasma-aided deposition processes have received an increasing attention. One of them was the plasma polymerisation. This process takes place in plasma of an electrical discharge operated in a mixture of an inert gas (usually argon) and an organic gas or vapour at low pressure. Resulting deposits (called plasma polymers) differ substantially from the conventional polymers; they posses, however, the unique properties. In spite of these successes certain problems remain, for example inreproducibility and ageing of these films mainly because of the lack of the proper in situ plasma diagnostics. The chief diagnostics methods that are used are the optical emission spectroscopy, corpuscular diagnostics (mass spectrometry) and Langmuir probes. For the Langmuir probe plasma diagnostics was especially developed high - speed measuring system controlled by personal computer. The high-speed measuring system gives improvements of the probe diagnostics of the plasma in the specif

Název v anglickém jazyce

Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.

Popis výsledku anglicky

In recent years the plasma-aided deposition processes have received an increasing attention. One of them was the plasma polymerisation. This process takes place in plasma of an electrical discharge operated in a mixture of an inert gas (usually argon) and an organic gas or vapour at low pressure. Resulting deposits (called plasma polymers) differ substantially from the conventional polymers; they posses, however, the unique properties. In spite of these successes certain problems remain, for example inreproducibility and ageing of these films mainly because of the lack of the proper in situ plasma diagnostics. The chief diagnostics methods that are used are the optical emission spectroscopy, corpuscular diagnostics (mass spectrometry) and Langmuir probes. For the Langmuir probe plasma diagnostics was especially developed high - speed measuring system controlled by personal computer. The high-speed measuring system gives improvements of the probe diagnostics of the plasma in the specif

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2002

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Czech. J. Physics

ISSN

0011-4626

e-ISSN

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Svazek periodika

x

Číslo periodika v rámci svazku

52

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

6

Strana od-do

794-799

Kód UT WoS článku

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EID výsledku v databázi Scopus

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