The Thermodynamic Model for Vacuum Technology
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60162694%3AG43__%2F20%3A00556340" target="_blank" >RIV/60162694:G43__/20:00556340 - isvavai.cz</a>
Výsledek na webu
<a href="https://iopscience.iop.org/article/10.1149/09901.0381ecst" target="_blank" >https://iopscience.iop.org/article/10.1149/09901.0381ecst</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1149/09901.0381ecst" target="_blank" >10.1149/09901.0381ecst</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
The Thermodynamic Model for Vacuum Technology
Popis výsledku v původním jazyce
The paper is focused on developing a mathematical model capable to describe thermodynamic processes connected with the vacuum technique. The model is based on the laws of energy and mass conservation, the air state behavior and the principles of airflow, including the critical flow. The problem has been solved numerically by MATLAB. The results of the solution include the pressure evolution for a given pumping speed and the volume to be evacuated. Solutions are obtained for cases of airflow to the vacuum chamber through an inlet opening for three various diameters. The solutions are validated by comparing with experimental data. The presented model agrees with the experiment quite well. One very useful application is the determination of the relation between the diameter of the inlet opening and the pumping speed of the vacuum pump at the pressure steady state condition. This is an important knowledge for a simple and reliable quantitative pressure control in vacuum systems.
Název v anglickém jazyce
The Thermodynamic Model for Vacuum Technology
Popis výsledku anglicky
The paper is focused on developing a mathematical model capable to describe thermodynamic processes connected with the vacuum technique. The model is based on the laws of energy and mass conservation, the air state behavior and the principles of airflow, including the critical flow. The problem has been solved numerically by MATLAB. The results of the solution include the pressure evolution for a given pumping speed and the volume to be evacuated. Solutions are obtained for cases of airflow to the vacuum chamber through an inlet opening for three various diameters. The solutions are validated by comparing with experimental data. The presented model agrees with the experiment quite well. One very useful application is the determination of the relation between the diameter of the inlet opening and the pumping speed of the vacuum pump at the pressure steady state condition. This is an important knowledge for a simple and reliable quantitative pressure control in vacuum systems.
Klasifikace
Druh
D - Stať ve sborníku
CEP obor
—
OECD FORD obor
20303 - Thermodynamics
Návaznosti výsledku
Projekt
—
Návaznosti
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Ostatní
Rok uplatnění
2020
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název statě ve sborníku
ECS Transactions
ISBN
978-160768539-5
ISSN
1938-5862
e-ISSN
1938-6737
Počet stran výsledku
11
Strana od-do
381-390
Název nakladatele
IOP Publishing Ltd
Místo vydání
Brno
Místo konání akce
Brno
Datum konání akce
6. 9. 2020
Typ akce podle státní příslušnosti
EUR - Evropská akce
Kód UT WoS článku
—