XRD real structure characterization of sputtered Au films different in thickness

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F11%3A43893001" target="_blank" >RIV/60461373:22310/11:43893001 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1524/zkpr.2011.0032" target="_blank" >http://dx.doi.org/10.1524/zkpr.2011.0032</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1524/zkpr.2011.0032" target="_blank" >10.1524/zkpr.2011.0032</a>

Jazyk výsledku

angličtina

Název v původním jazyce

XRD real structure characterization of sputtered Au films different in thickness

Popis výsledku v původním jazyce

The thin gold films were prepared by DC plasma sputtering in argon atmosphere on glass substrates with different sputtering times. On experimental samples with thicknesses from 10 to 90 nm the XRD structural analysis was carried out in order to observe the real structure changes in dependence on the film thickness. The XRD analysis included calcula-tion of lattice parameters, biaxial stress and size of the crystallites and micro-strains. A sim-ple evaluation of preferred orientation of crystallites perpendicular to the sample surface using the integral intensities ratio of two strongest diffraction lines was also performed. The results show strong dependence of all parameters on thickness of Au films. The size of the crystallites is linearly increasingwith growing film thickness whereas the lattice parameter is decreasing. The course of micro-strain and biaxial lattice stress is rapidly changing with increasing thickness of gold films due to relaxation of the structure.

Název v anglickém jazyce

XRD real structure characterization of sputtered Au films different in thickness

Popis výsledku anglicky

The thin gold films were prepared by DC plasma sputtering in argon atmosphere on glass substrates with different sputtering times. On experimental samples with thicknesses from 10 to 90 nm the XRD structural analysis was carried out in order to observe the real structure changes in dependence on the film thickness. The XRD analysis included calcula-tion of lattice parameters, biaxial stress and size of the crystallites and micro-strains. A sim-ple evaluation of preferred orientation of crystallites perpendicular to the sample surface using the integral intensities ratio of two strongest diffraction lines was also performed. The results show strong dependence of all parameters on thickness of Au films. The size of the crystallites is linearly increasingwith growing film thickness whereas the lattice parameter is decreasing. The course of micro-strain and biaxial lattice stress is rapidly changing with increasing thickness of gold films due to relaxation of the structure.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

CD - Makromolekulární chemie

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Zeitschrift für Kristallographie Proceedings

ISSN

1869-1315

e-ISSN

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Svazek periodika

Neuveden

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

6

Strana od-do

215-220

Kód UT WoS článku

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EID výsledku v databázi Scopus

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