Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F16%3A43902116" target="_blank" >RIV/60461373:22310/16:43902116 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/16:00467513 RIV/68407700:21230/16:00243217

Výsledek na webu

<a href="http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=1&SID=W2SNr2bKad2GUDPNsbs&page=1&doc=1" target="_blank" >http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=1&SID=W2SNr2bKad2GUDPNsbs&page=1&doc=1</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2016.04.026" target="_blank" >10.1016/j.tsf.2016.04.026</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Popis výsledku v původním jazyce

The high index of refraction planar optical waveguides operating in the near infrared spectrum were prepared from the intrinsic hydrogenated amorphous silicon (a-Si:H) layer coated by nanocrystalline diamond (NCD). The a-Si:H layers were grown by radio frequency plasma enhanced chemical vapor deposition on glass substrates from silane and hydrogen mixture at the substrate temperature about 250 oC followed at 210 oC by the NCD coating grown by the microwave plasma enhanced chemical vapor deposition from hydrogen rich plasma with adding methane and carbon dioxide at the substrate temperature. The optical absorptance spectra, Raman spectra and scanning electron microscopy reveal the diamond character of the NCD coatings as well as the stability of a-Si:H layer during NCD deposition. The critical issue of the NCD coated a-Si:H optical waveguide is the optical absorption in NCD coating. The Finite Element Method simulations show that the near infrared optical absorption coefficient of the NCD coating must be reduced below 10/cm to reduce the optical attenuation below 1 dB/cm in the planar waveguide with the 50 nm thick NCD coating. ? 2016

Název v anglickém jazyce

Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Popis výsledku anglicky

The high index of refraction planar optical waveguides operating in the near infrared spectrum were prepared from the intrinsic hydrogenated amorphous silicon (a-Si:H) layer coated by nanocrystalline diamond (NCD). The a-Si:H layers were grown by radio frequency plasma enhanced chemical vapor deposition on glass substrates from silane and hydrogen mixture at the substrate temperature about 250 oC followed at 210 oC by the NCD coating grown by the microwave plasma enhanced chemical vapor deposition from hydrogen rich plasma with adding methane and carbon dioxide at the substrate temperature. The optical absorptance spectra, Raman spectra and scanning electron microscopy reveal the diamond character of the NCD coatings as well as the stability of a-Si:H layer during NCD deposition. The critical issue of the NCD coated a-Si:H optical waveguide is the optical absorption in NCD coating. The Finite Element Method simulations show that the near infrared optical absorption coefficient of the NCD coating must be reduced below 10/cm to reduce the optical attenuation below 1 dB/cm in the planar waveguide with the 50 nm thick NCD coating. ? 2016

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

618

Číslo periodika v rámci svazku

618

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

4

Strana od-do

130-133

Kód UT WoS článku

000389112000024

EID výsledku v databázi Scopus

2-s2.0-84995890844