Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F16%3A00243217" target="_blank" >RIV/68407700:21230/16:00243217 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/16:00467513 RIV/60461373:22310/16:43902116

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S0040609016300955" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609016300955</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2016.04.026" target="_blank" >10.1016/j.tsf.2016.04.026</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Popis výsledku v původním jazyce

The intrinsic hydrogenated amorphous silicon (a-Si:H) near infrared planar waveguides were grown on glass substrates from silane/hydrogen mixture at the substrate temperature about 250°C. Nanocrystalline diamond (NCD) coatings with reduced surface roughness were grown on a-Si:H by the microwave plasma enhanced chemical vapor deposition from hydrogen rich plasma with adding methane and carbon dioxide at temperature as low as 210°C. The optical absorptance spectra, Raman spectra and scanning electron microscopy (SEM) reveal the diamond character of the coatings as well as the stability of a-Si:H layer during diamond deposition. The critical issue for applying NCD/a-Si:H structures as optical waveguides is the optical absorption in NCD coatings. The COMSOL Multiphysics FEM simulations show that the near infrared optical absorptance in NCD coating must be reduced below 10/cm to reduce the optical attenuation in NCD/a-Si:H waveguide below 1 dB/cm.

Název v anglickém jazyce

Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Popis výsledku anglicky

The intrinsic hydrogenated amorphous silicon (a-Si:H) near infrared planar waveguides were grown on glass substrates from silane/hydrogen mixture at the substrate temperature about 250°C. Nanocrystalline diamond (NCD) coatings with reduced surface roughness were grown on a-Si:H by the microwave plasma enhanced chemical vapor deposition from hydrogen rich plasma with adding methane and carbon dioxide at temperature as low as 210°C. The optical absorptance spectra, Raman spectra and scanning electron microscopy (SEM) reveal the diamond character of the coatings as well as the stability of a-Si:H layer during diamond deposition. The critical issue for applying NCD/a-Si:H structures as optical waveguides is the optical absorption in NCD coatings. The COMSOL Multiphysics FEM simulations show that the near infrared optical absorptance in NCD coating must be reduced below 10/cm to reduce the optical attenuation in NCD/a-Si:H waveguide below 1 dB/cm.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/FR-TI3%2F797" target="_blank" >FR-TI3/797: *Výzkum a vývoj technologie polymerních optických vlnově selektivních prvků pro informatiku a senzoriku</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

618

Číslo periodika v rámci svazku

Part A

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

4

Strana od-do

130-133

Kód UT WoS článku

000389112000024

EID výsledku v databázi Scopus

2-s2.0-84995890844