Nano-LED induced chemical reactions for structuring processes

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F20%3A43920381" target="_blank" >RIV/60461373:22310/20:43920381 - isvavai.cz</a>

Výsledek na webu

<a href="https://pubs.rsc.org/en/content/articlehtml/2020/na/d0na00851f" target="_blank" >https://pubs.rsc.org/en/content/articlehtml/2020/na/d0na00851f</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1039/d0na00851f" target="_blank" >10.1039/d0na00851f</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Nano-LED induced chemical reactions for structuring processes

Popis výsledku v původním jazyce

We present a structuring technique based on the initialization of chemical reactions by an array of nano-LEDs which is used in the near-field as well as in the far-field regime. In the near-field regime, we demonstrate first results with the nano-LED array for lithography using the photoresist DiazoNaphthoQuinone-(DNQ)-sulfonate for the fabrication of holes in the resist down to similar to 75 nanometres in diameter. In contrast, the nano-LEDs can also be employed in the far-field regime to expose thin films of the monomer bisphenol A-glycidyl methacrylate (Bis-GMA) and to initialize polymerization locally. Photosensitive films were patterned and spherical cone-shaped three dimensional objects with diameters ranging from similar to 480 nm up to 20 micrometres were obtained. The modification in the material as a result of the photochemical reaction induced i.e. by polymerization was confirmed by Raman spectroscopy. This structuring maskless technique has the potential to induce substantial changes in photosensitive molecules and to produce the desired structures from the tens of microns down to the nanometre scale.

Název v anglickém jazyce

Nano-LED induced chemical reactions for structuring processes

Popis výsledku anglicky

We present a structuring technique based on the initialization of chemical reactions by an array of nano-LEDs which is used in the near-field as well as in the far-field regime. In the near-field regime, we demonstrate first results with the nano-LED array for lithography using the photoresist DiazoNaphthoQuinone-(DNQ)-sulfonate for the fabrication of holes in the resist down to similar to 75 nanometres in diameter. In contrast, the nano-LEDs can also be employed in the far-field regime to expose thin films of the monomer bisphenol A-glycidyl methacrylate (Bis-GMA) and to initialize polymerization locally. Photosensitive films were patterned and spherical cone-shaped three dimensional objects with diameters ranging from similar to 480 nm up to 20 micrometres were obtained. The modification in the material as a result of the photochemical reaction induced i.e. by polymerization was confirmed by Raman spectroscopy. This structuring maskless technique has the potential to induce substantial changes in photosensitive molecules and to produce the desired structures from the tens of microns down to the nanometre scale.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10402 - Inorganic and nuclear chemistry

Projekt

<a href="/cs/project/LTAUSA19034" target="_blank" >LTAUSA19034: Dvoudimenzionální nanomateriály pro aplikace v elektronice</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nanoscale Advances

ISSN

2516-0230

e-ISSN

—

Svazek periodika

2

Číslo periodika v rámci svazku

11

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

5421-5427

Kód UT WoS článku

000588627700033

EID výsledku v databázi Scopus

2-s2.0-85096039316